2 42 48 4771 K.Tanaka dummy 1 2006/7/2/17:34:39(172.16.44.138) target change 5. Ta -> PZT 3 0 18 4771 K.Tanaka dummy 1 2006/7/2/17:35:38(172.16.44.138) target change 5. Ta -> PZT 300℃ 3 18 24 4771 K.Tanaka dummy 0 2006/7/2/17:36:44(172.16.44.138) PZT 300℃ 3 24 38 4771 K . Tanaka dummy 1 2006/7/3/12:17:27(130.34.89.180) 真空引き中 6 28 34 7122 野村 亮介 dummy 0 2006/7/4/17:7:25(130.34.198.5) Al -4 40 48 6937 Kurahashi dummy 0 2006/7/4/17:23:45(130.34.95.43) 0 2006/7/4/17:25:9(130.34.95.43) 4 40 48 6937 Kurahashi dummy 1 2006/7/4/17:26:1(130.34.95.43) target change 5 0 12 6937 Kurahashi dummy 1 2006/7/4/17:27:48(130.34.95.43) Pump down -5 26 32 6937 Kurahashi dummy 0 2006/7/4/17:29:1(130.34.95.43) 0 2006/7/4/17:29:28(130.34.95.43) -5 26 32 6937 Kurahashi dummy 0 2006/7/4/17:29:58(130.34.95.43) W 2006/7/5/14:11:15(130.34.95.43) -5 32 36 6937 Kurahashi dummy 0 2006/7/5/14:10:50(130.34.95.43) 0 2006/7/5/14:11:11(130.34.95.43) 5 26 31 6937 Kurahashi dummy 0 2006/7/4/17:29:58(130.34.95.43) W 5 31 36 6937 Kurahashi dummy 0 2006/7/5/14:11:49(130.34.95.43) W -7 28 46 2074 Lee dummy 0 2006/7/5/23:35:47(130.34.248.216) Cr 2006/7/5/23:37:26(130.34.248.216) -7 28 44 2074 Lee dummy 0 2006/7/5/23:37:52(130.34.248.216) 0 2006/7/5/23:38:24(130.34.248.216) -7 28 44 2074 Lee dummy 0 2006/7/5/23:38:49(130.34.248.216) Cr 2006/7/6/16:58:6(172.16.44.129) 6 34 44 6937 Matsuo dummy 1 2006/7/6/14:59:55(130.34.95.43) Inspection & Repair 5 36 44 6937 Matsuo dummy 1 2006/7/6/15:3:57(130.34.95.43) INspection & Repair 7 28 44 2074 Hyo-Jong Lee dummy 0 2006/7/6/16:58:37(172.16.44.129) Cr, 4404 -9 38 48 4771 K . Tanaka dummy 0 2006/7/7/19:21:46(130.34.89.180) target change 1Cr ->PZT , 2006/7/7/19:22:12(130.34.89.180) 9 38 48 4771 K . Tanaka dummy 1 2006/7/7/19:22:30(130.34.89.180) target change 1Cr ->PZT , 10 0 18 4771 K . Tanaka dummy 1 2006/7/7/19:22:55(130.34.89.180) target change 1Cr ->PZT , -10 18 24 4771 K . Tanaka dummy 0 2006/7/7/19:23:34(130.34.89.180) PZT 2006/7/10/7:22:43(130.34.89.180) -11 24 28 4771 K . Tanaka dummy 0 2006/7/9/14:38:29(130.34.89.180) PZT 2006/7/10/18:23:16(130.34.89.180) 10 33 36 4771 K.Tanaka dummy 0 2006/7/10/16:25:12(172.16.44.138) PZT　３００℃ 12 34 38 4830 M. Otani dummy 0 2006/7/10/20:56:9(130.34.95.30) Target change Cu 12 38 48 4830 M. Otani dummy 0 2006/7/10/20:59:5(130.34.95.30) target change 13 0 14 4830 M. Otani dummy 0 2006/7/10/20:59:45(130.34.95.30) target change 13 30 34 4830 M. Otani dummy 0 2006/7/10/21:4:51(130.34.95.30) Cu at room temperture 13 34 40 7122 野村 亮介 dummy 0 2006/7/11/12:22:29(130.34.198.5) Cu -13 40 44 4771 K . Tanaka dummy 0 2006/7/11/17:51:14(130.34.89.180) PZT 300℃ 2006/7/12/19:20:30(130.34.89.180) -13 40 48 4771 K . Tanaka dummy 0 2006/7/12/19:21:0(130.34.89.180) target change 1Cu->PZT 　300℃ 2006/7/12/19:21:30(130.34.89.180) -14 0 18 4771 K . Tanaka dummy 1 2006/7/12/19:21:19(130.34.89.180) target change 1Cu->PZT 　300℃ 2006/7/13/20:49:9(172.16.44.138) -13 40 48 4771 K . Tanaka dummy 1 2006/7/12/19:30:24(130.34.89.180) target change 1Cu->PZT 　300℃ 2006/7/13/20:47:30(172.16.44.138) 13 40 44 4771 K . Tanaka dummy 1 2006/7/12/19:30:24(130.34.89.180) target change 1Cu->PZT 　300℃ 13 44 48 4771 K.Tanaka dummy 1 2006/7/13/20:48:37(172.16.44.138) 1 Cr -> PZT 14 0 16 4771 K.Tanaka dummy 1 2006/7/13/20:49:57(172.16.44.138) 1 Cr -> PZT 14 16 20 4771 K.Tanaka dummy 0 2006/7/14/8:55:10(172.16.44.138) PZT 315℃ -14 28 32 4771 K.Tanaka dummy 0 2006/7/14/8:55:56(172.16.44.138) PZT 2006/7/14/13:24:18(130.34.95.43) 14 28 29 4771 K.Tanaka dummy 0 2006/7/14/8:55:56(172.16.44.138) PZT 14 32 48 6898 yamaya dummy 0 2006/7/14/15:53:6(130.34.95.28) Target change Cu → Ta 16 32 36 4771 K.Tanaka dummy 0 2006/7/14/17:57:0(172.16.44.138) PZT 320℃ 15 22 28 6898 yamaya dummy 0 2006/7/15/10:33:30(130.34.95.28) Ta R.T. 16 20 24 6898 yamaya dummy 0 2006/7/15/21:0:2(130.34.95.28) Ta R.T. 17 20 30 6898 yamaya dummy 0 2006/7/16/19:43:28(130.34.95.28) Ta R.T. 17 33 40 6898 yamaya dummy 0 2006/7/17/16:22:33(130.34.95.28) Ta R.T. -18 32 38 7122 多胡 dummy 0 2006/7/18/8:28:6(130.34.198.5) 電子工学科伊藤研究室 2006/7/18/8:29:48(130.34.198.5) -18 32 38 7122 K.Tago dummy 0 2006/7/18/8:30:24(130.34.198.5) PZT 320℃ 2006/7/18/9:26:24(130.34.198.5) -18 38 44 7122 K.Tago dummy 0 2006/7/18/11:28:53(130.34.198.5) PZT 320℃ 2006/7/18/11:29:42(130.34.198.5) -18 38 44 7122 K.Tago dummy 0 2006/7/18/11:30:5(130.34.198.5) PZT 320℃ 2006/7/18/13:39:8(130.34.198.5) 18 38 42 6937 hashimoto dummy 0 2006/7/18/13:44:31(130.34.95.43) target change Cr/Au 18 42 48 6937 hashimoto dummy 0 2006/7/18/13:45:39(130.34.95.43) pump down 19 22 26 6937 hashimoto dummy 0 2006/7/18/13:46:17(130.34.95.43) Cr/Au -20 34 38 4830 M. Otani dummy 0 2006/7/18/20:22:10(130.34.95.30) target change Au->Cu 2006/7/20/16:21:23(130.34.95.30) -20 38 48 4830 M. Otani dummy 0 2006/7/18/20:24:34(130.34.95.30) pump down 2006/7/20/16:23:37(130.34.95.30) -21 26 32 4830 M. Otani dummy 0 2006/7/18/20:30:6(130.34.95.30) Cr / Cu at 250℃. 2006/7/21/12:8:46(130.34.95.30) -19 38 48 4771 K . Tanaka dummy 0 2006/7/19/2:17:26(130.34.89.180) target change Au -> PZT 　300℃ 2006/7/19/2:17:58(130.34.89.180) -20 0 16 4771 K . Tanaka dummy 1 2006/7/19/2:17:53(130.34.89.180) target change Au -> PZT 　300℃ 2006/7/19/17:33:2(130.34.89.180) 19 38 48 4771 K . Tanaka dummy 1 2006/7/19/2:18:17(130.34.89.180) target change Au -> PZT 　300℃ 20 20 26 4771 K . Tanaka dummy 0 2006/7/19/2:18:53(130.34.89.180) PZT 300℃ 19 26 32 6937 hashimoto dummy 0 2006/7/19/12:40:1(130.34.95.43) Cr/Au 19 33 38 4771 TANAKA dummy 1 2006/7/19/16:32:35(172.16.44.138) target change 20 0 3 4771 K . Tanaka dummy 1 2006/7/19/17:33:32(130.34.89.180) target change Au -> PZT 　300℃ 20 26 34 4771 K . Tanaka dummy 0 2006/7/20/12:12:24(130.34.89.180) PZT 300℃ 20 34 35 4830 M. Otani dummy 0 2006/7/18/20:22:10(130.34.95.30) target change Au->Cu 20 35 42 4771 K . Tanaka dummy 0 2006/7/20/16:37:18(130.34.89.180) PZT 300℃ 20 42 48 4830 M. Otani dummy 0 2006/7/20/16:40:51(130.34.95.30) target change PZT => Cu 　250℃ 21 0 12 4830 M. Otani dummy 0 2006/7/20/23:53:39(130.34.95.30) pump down 21 26 27 4830 M. Otani dummy 0 2006/7/18/20:30:6(130.34.95.30) Cr / Cu at 250℃. 21 42 48 4830 M. Otani dummy 0 2006/7/21/12:9:26(130.34.95.30) Cr / Cu 250℃ 25 26 35 7122 R.Nomura dummy 0 2006/7/24/13:11:36(130.34.198.5) Cu R.T -26 26 35 4404 Hyo-Jong Lee dummy 0 2006/7/24/16:37:0(130.34.248.216) (Cr depo.) 2006/7/26/10:55:22(130.34.248.216) 25 40 48 6937 Randles dummy 0 2006/7/24/19:9:32(130.34.95.43) Cr/Au Target Change -26 20 24 6937 Randles dummy 0 2006/7/24/19:10:44(130.34.95.43) Cr/Au sputter at 170 2006/7/26/10:14:8(130.34.95.43) 26 40 48 6937 Kurahashi dummy 0 2006/7/25/17:14:47(130.34.95.43) target change -27 32 35 6937 Kurahashi dummy 0 2006/7/25/17:16:49(130.34.95.43) W sputter 2006/7/25/17:16:54(130.34.95.43) 27 22 26 6937 Kurahashi dummy 0 2006/7/25/17:17:15(130.34.95.43) W sputter -26 35 40 5251 Mike dummy 0 2006/7/25/18:13:35(130.34.95.8) Cr/Au sputter 2006/7/25/20:59:36(130.34.95.8) 26 24 26 5251 Mike dummy 0 2006/7/25/20:59:24(130.34.95.8) Cr/Au @170 26 20 23 6937 Randles dummy 0 2006/7/24/19:10:44(130.34.95.43) Cr/Au sputter at 170 26 26 40 4404 Hyo-Jong Lee dummy 0 2006/7/26/10:55:50(130.34.248.216) Cr dep. 27 40 48 4830 Y.Sato dummy 0 2006/7/27/0:45:32(130.34.95.30) Cr/Cu target change -28 18 26 4830 Y.Sato dummy 0 2006/7/27/0:49:6(130.34.95.30) Cr/Cu sputter at 250℃ 2006/7/28/11:23:18(172.16.44.138) -30 42 48 4771 miyashita dummy 1 2006/7/27/14:59:56(130.34.89.180) target change Pt,Cr 2006/7/27/15:8:38(130.34.89.180) -31 18 21 4771 miyashita dummy 0 2006/7/27/15:3:43(130.34.89.180) Pt sputter 2006/7/27/15:8:28(130.34.89.180) 28 18 25 4830 Y.Sato dummy 0 2006/7/27/0:49:6(130.34.95.30) Cr/Cu sputter at 250℃ 28 30 38 4830 Y.Sato dummy 0 2006/7/28/11:25:25(172.16.44.138) Cu/Cr suptter at 250℃ 28 38 42 4830 Y.Sato dummy 0 2006/7/28/18:51:0(172.16.44.138) Cr/Cu sputter at 250℃ 31 22 26 6937 D.Satoh dummy 0 2006/7/31/10:14:51(130.34.95.43) 0 31 26 32 7122 野村 亮介 dummy 0 2006/7/31/11:45:21(130.34.198.5) Cu R.T. 31 40 48 6937 Andrew dummy 0 2006/7/31/14:52:46(130.34.95.43) Target Change Cr/Au