5	38	48	7122	S.Fujii (ito lab)	dummy	1	2006/5/30/19:51:57(130.34.198.5)	target change
-6	0	18	7122	S.Fujii (ito lab)	dummy	0	2006/5/30/19:52:23(130.34.198.5)	target change	2006/5/30/19:52:31(130.34.198.5)
6	0	18	7122	S.Fujii (ito lab)	dummy	1	2006/5/30/19:52:48(130.34.198.5)	target change
6	18	26	7122	S.Fujii (ito lab)	dummy	0	2006/5/30/19:53:27(130.34.198.5)	target: Al, Pt
-7	32	38	2074	Lee(HJ)	dummy	0	2006/5/31/20:42:0(130.34.248.188)	0	2006/5/31/20:42:23(130.34.248.188)
-2	28	32	6937	Andrew Randles	dummy	0	2006/5/31/20:46:37(130.34.95.43)	Cr/Au at 170 C	2006/6/1/13:47:53(130.34.95.43)
-6	34	42	2074	Goto	dummy	0	2006/5/31/20:53:16(130.34.248.188)	Cr, Au	2006/5/31/20:54:32(130.34.248.188)
-6	34	42	2074	Au	dummy	0	2006/5/31/20:55:22(130.34.248.188)	0	2006/5/31/20:56:7(130.34.248.188)
-6	34	42	2074	Goto	dummy	0	2006/5/31/20:56:43(130.34.248.188)	Au, Room temperature	2006/5/31/21:2:6(130.34.248.188)
-5	26	36	2074	Goto	dummy	0	2006/5/31/21:3:27(130.34.248.188)	Cr/Au at room temperature	2006/6/2/13:41:54(130.34.248.188)
1	20	30	6937	H.Matsuo	dummy	0	2006/6/1/9:24:10(130.34.95.43)	Pt at 315°
-6	26	32	4771	Sato	dummy	0	2006/6/1/14:53:0(130.34.89.180)	Al at room temperature	2006/6/4/23:50:7(130.34.89.180)
-6	40	48	4771	K.shibata	dummy	1	2006/6/1/21:55:5(130.34.89.180)	target change 1.PZT  2.Ti  3.Pt  	2006/6/1/21:56:8(130.34.89.180)
6	40	48	4771	K.shibata	dummy	1	2006/6/1/21:56:46(130.34.89.180)	target change 1.PZT 2.Ti 3.Pt 
7	0	18	4771	K.shibata	dummy	1	2006/6/1/21:57:9(130.34.89.180)	target change 1.PZT 2.Ti 3.Pt 
-7	28	34	4771	K.shibata	dummy	0	2006/6/1/21:58:54(130.34.89.180)	PZT,Ti,Pt	2006/6/1/22:48:10(130.34.89.180)
-3	42	48	5318	A.ueno	dummy	0	2006/6/1/22:9:51(130.34.231.209)	寒川研　宇恵野　章[target chenge Al]	2006/6/3/17:39:55(130.34.231.209)
4	24	38	5318	A.ueno	dummy	0	2006/6/1/22:11:14(130.34.231.209)	Al
-7	28	34	4771	K.Shibata	dummy	0	2006/6/1/22:48:29(130.34.89.180)	PZT/Pt/Ti  315℃	2006/6/7/8:32:1(130.34.89.180)
-5	26	36	2074	後藤	dummy	0	2006/6/2/13:49:29(130.34.248.30)	Cr/Au/Ti	2006/6/2/13:50:47(130.34.248.30)
-4	40	48	2074	Goto	dummy	0	2006/6/2/13:50:42(130.34.248.30)	Target change  Cr / Au / Ti	2006/6/2/17:58:14(130.34.248.188)
-5	26	37	2074	Goto	dummy	0	2006/6/2/13:51:40(130.34.248.30)	Cr / Au / Ti at room temperature	2006/6/2/17:58:42(130.34.248.188)
-5	18	26	2074	Goto	dummy	0	2006/6/2/13:52:11(130.34.248.30)	Target change Cr / Au /Ti	2006/6/2/17:58:23(130.34.248.188)
5	26	36	2074	Goto	dummy	0	2006/6/2/18:0:29(130.34.248.188)	Au/Ti at room temperature
-4	42	48	2074	Goto	dummy	0	2006/6/2/18:1:20(130.34.248.188)	Target change from Cr to Ti	2006/6/2/18:1:47(130.34.248.188)
-4	44	48	2074	Goto	dummy	0	2006/6/2/18:2:16(130.34.248.188)	Target change from Cr to Ti	2006/6/3/23:46:1(130.34.248.188)
-5	0	18	2074	Goto	dummy	0	2006/6/2/18:2:39(130.34.248.188)	Target change from Cr to Ti	2006/6/2/18:5:38(130.34.248.188)
-8	44	48	2074	Goto	dummy	0	2006/6/2/18:3:54(130.34.248.188)	Target change to Ta	2006/6/8/15:50:58(130.34.248.188)
-9	0	18	2074	Goto	dummy	0	2006/6/2/18:4:14(130.34.248.188)	Target change to Ta	2006/6/8/8:17:53(130.34.248.188)
-9	26	32	2074	Goto	dummy	0	2006/6/2/18:5:4(130.34.248.188)	Ta at room temperature	2006/6/6/15:59:19(130.34.248.188)
-5	0	26	2074	Goto	dummy	0	2006/6/2/18:6:6(130.34.248.188)	Target change from Cr to Ti	2006/6/3/23:46:56(130.34.248.188)
-3	38	48	5318	A.ueno	dummy	0	2006/6/3/17:41:14(130.34.231.209)	target chenge 5 al	2006/6/3/18:15:54(130.34.231.209)
3	36	38	6936	Andrew Randles	dummy	0	2006/6/3/17:59:43(130.34.95.43)	Cr/Au at 170 C
3	38	39	5318	A.ueno	dummy	0	2006/6/3/17:41:14(130.34.231.209)	target chenge 5 al
3	39	48	5318	A.ueno	dummy	0	2006/6/3/18:18:42(130.34.231.209)	target change al 
4	42	48	4771	sato	dummy	0	2006/6/4/23:50:56(130.34.89.180)	Al at room temperature
6	26	36	6937	H.Matsuo	dummy	0	2006/6/5/14:54:43(130.34.95.43)	Ti & Pt at 315℃
-8	26	30	4771	Tanaka	dummy	0	2006/6/5/20:51:36(130.34.89.180)	PZT/Pt/Ti 320℃	2006/6/7/23:56:18(130.34.89.180)
-9	38	44	2074	Goto	dummy	0	2006/6/6/15:59:45(130.34.248.188)	Ta deposition at room temperature	2006/6/8/15:54:58(130.34.248.188)
7	18	24	4771	Shibata	dummy	0	2006/6/7/8:31:53(130.34.89.180)	PZT 320℃
9	0	26	2074	Goto	dummy	0	2006/6/8/8:19:5(130.34.248.188)	Target change to Ta and baking
8	39	48	2074	Goto, Lee	dummy	0	2006/6/8/15:53:1(130.34.248.188)	Target change : PZT -> Cr, Pt -> Au, Ti -> Ta
-11	26	34	2074	Goto, Lee	dummy	0	2006/6/8/15:54:25(130.34.248.188)	Cr deposition at room temperature	2006/6/8/15:55:12(130.34.248.188)
-12	26	34	2074	Goto, Lee	dummy	0	2006/6/8/15:55:54(130.34.248.188)	Cr deposition at room temperature	2006/6/12/12:10:19(130.34.248.188)
9	38	44	2074	Goto, Lee	dummy	0	2006/6/8/15:58:25(130.34.248.188)	Ta, Au deposition at room temperature
9	31	38	2074	Lee	dummy	0	2006/6/9/0:7:22(130.34.248.188)	Au and W deposition at room temperature
9	44	48	6925	Hasumi	dummy	0	2006/6/9/14:7:18(130.34.95.35)	W at room temperature
10	38	48	5318	A.ueno	dummy	0	2006/6/9/21:29:46(130.34.231.209)	taregt chenge Al
11	24	34	5318	A.ueno	dummy	0	2006/6/9/21:30:43(130.34.231.209)	Al at rt
12	43	48	4771	SATO	dummy	0	2006/6/11/16:3:42(130.34.94.185)	Al at room temperature
11	36	46	5318	A.UENO	dummy	0	2006/6/11/16:55:0(130.34.94.185)	Al at room temperature
12	36	43	6925	Hasumi	dummy	0	2006/6/12/10:14:42(130.34.95.35)	W at room temperature
12	26	27	2074	Goto, Lee	dummy	0	2006/6/8/15:55:54(130.34.248.188)	Cr deposition at room temperature
13	29	36	6925	Hasumi	dummy	0	2006/6/13/14:23:27(130.34.95.35)	0
-13	38	48	7124	T.Isogai	dummy	1	2006/6/13/16:3:11(130.34.75.68)	Target Change Al->Pt	2006/6/13/16:5:29(130.34.75.68)
-13	38	48	7124	T.Isogai	dummy	1	2006/6/13/16:6:56(130.34.75.68)	Target Change Al->Pt (naisen 3977)	2006/6/13/16:57:16(130.34.75.68)
-14	18	28	7124	T.Isogai	dummy	0	2006/6/13/16:35:32(130.34.75.68)	Pt at room temperature(naisen 3977)	2006/6/13/20:6:5(130.34.75.68)
-14	38	48	7124	T.Isogai	dummy	1	2006/6/13/16:57:51(130.34.75.68)	Target Change Pt (naisen 3977)	2006/6/13/20:6:8(130.34.75.68)
16	26	32	7124	T.Isogai	dummy	1	2006/6/14/14:31:38(130.34.75.68)	Target Change Pt (naisen 3977)
16	42	46	7124	T.Isogai	dummy	0	2006/6/14/14:32:15(130.34.75.68)	Pt at room temperature(naisen 3977)
14	36	44	6937	Nozawa	dummy	0	2006/6/14/17:29:20(130.34.95.43)	Al at room temp
14	44	48	6936	Andrew Randles	dummy	0	2006/6/14/20:40:3(130.34.95.43)	Target change Cr/Au
-15	0	16	6936	A	dummy	0	2006/6/14/20:40:27(130.34.95.43)	0	2006/6/14/20:41:0(130.34.95.43)
15	0	16	6936	Andrew Randles	dummy	0	2006/6/14/20:41:48(130.34.95.43)	Pump Down
15	22	26	6936	Andrew Randles	dummy	0	2006/6/14/22:14:50(130.34.95.43)	Cr/Au at 170 C
17	44	48	7124	T.Isogai	dummy	0	2006/6/16/22:58:11(130.34.75.68)	Pt at room 320deg. (naisen 3977)
17	36	40	7124	T.Isogai	dummy	0	2006/6/17/16:37:24(130.34.75.68)	Pt at room 320deg. (naisen 3977)
19	2	26	4771	K.shibata	dummy	1	2006/6/18/23:44:50(130.34.89.180)	target change 1. PZT 3.Pt 5. W 
-19	28	34	4771	K.shibata	dummy	0	2006/6/18/23:45:40(130.34.89.180)	PZT at 320℃	2006/6/18/23:46:16(130.34.89.180)
-19	28	34	4771	K.shibata	dummy	0	2006/6/18/23:46:41(130.34.89.180)	PZT 320℃	2006/6/19/6:12:9(130.34.89.180)
19	26	48	4771	K.shibata	dummy	1	2006/6/19/6:12:30(130.34.89.180)	target change 1. PZT 3.Pt 5. W 
20	38	44	4771	K.shibata	dummy	0	2006/6/19/17:19:20(130.34.89.180)	PZT 320℃
-20	44	48	5318	A.Ueno	dummy	0	2006/6/20/15:3:14(130.34.231.209)	target chenge Al 	2006/6/20/21:50:47(130.34.94.185)
-21	33	41	5318	A.Ueno	dummy	0	2006/6/20/15:3:40(130.34.231.209)	Al at rt	2006/6/20/21:52:46(130.34.94.185)
20	44	46	5318	A.Ueno	dummy	0	2006/6/20/15:3:14(130.34.231.209)	target chenge Al 
21	21	33	5318	A.UENO	dummy	0	2006/6/20/21:51:39(130.34.94.185)	tareget chenge Al
21	33	41	5318	A.UENO	dummy	0	2006/6/20/21:53:15(130.34.94.185)	Al at room temperature
27	26	34	2074	Goto	dummy	0	2006/6/21/12:15:20(130.34.248.202)	Cr deposition at room temperature
26	42	48	2074	Goto	dummy	0	2006/6/21/12:15:41(130.34.248.202)	Target change to Cr
27	0	26	2074	Goto	dummy	0	2006/6/21/12:16:6(130.34.248.202)	Target change to Cr
27	34	38	2074	Lee Hyunjae	dummy	0	2006/6/21/15:41:29(130.34.248.202)	Pt deposition at room temperature
22	38	42	6898	yamaya	dummy	0	2006/6/22/16:35:21(130.34.95.28)	Target change from W to Ta
23	33	38	6898	yamaya	dummy	0	2006/6/22/16:37:42(130.34.95.28)	Ta R.T.
28	38	48	6937	Nozawa	dummy	0	2006/6/23/20:48:26(130.34.95.43)	Target change Au
29	0	22	6937	Nozawa	dummy	0	2006/6/23/20:49:18(130.34.95.43)	Target change Au
29	22	28	6937	Nozawa	dummy	0	2006/6/23/20:50:12(130.34.95.43)	Au/Cr at 300℃
24	0	4	6898	yamaya 	dummy	0	2006/6/24/0:6:40(130.34.95.28)	Ta
26	31	38	6898	Settsu	dummy	0	2006/6/26/14:57:3(130.34.95.28)	0
27	42	48	2074	Goto	dummy	1	2006/6/27/11:45:25(130.34.248.206)	0
28	0	20	2074	Goto	dummy	1	2006/6/27/11:45:46(130.34.248.206)	0
28	20	38	2074	Goto	dummy	1	2006/6/27/20:6:43(130.34.248.206)	0
29	28	40	6937	Yoshida	dummy	0	2006/6/27/23:3:58(130.34.95.43)	Au at 300℃
29	40	43	6937	Yoshida	dummy	0	2006/6/29/19:21:41(130.34.95.43)	0