-1 40 48 6898 k.kato dummy 0 2006/10/30/15:16:42(130.34.95.28) Tiターゲット調整 2006/11/1/17:51:57(130.34.95.28) -2 0 12 6898 k.kato dummy 0 2006/10/30/15:17:7(130.34.95.28) Tiターゲット調整 2006/11/1/17:52:3(130.34.95.28) 2 38 42 6936 kawai dummy 0 2006/11/2/19:11:19(172.16.44.142) PZT@320 2 44 48 6936 kawai dummy 0 2006/11/2/20:57:10(172.16.44.142) PZT@320 3 23 26 4771 田中 dummy 0 2006/11/3/11:30:33(172.16.44.142) PZT 320℃ 3 35 39 4771 田中 dummy 0 2006/11/3/17:2:16(130.34.95.43) PZT　３２０℃ 5 26 30 4771 田中克洋 dummy 0 2006/11/4/13:20:48(130.34.89.180) PZT 320℃ 5 30 34 4771 K.shibata dummy 0 2006/11/5/14:11:49(130.34.89.180) PZT at 320℃ -6 40 48 4771 sato dummy 0 2006/11/5/23:11:37(130.34.89.180) Target change 3.W→Al 2006/11/6/15:39:20(172.16.44.140) 7 18 24 4771 sato dummy 0 2006/11/5/23:14:55(130.34.89.180) Al@R.T. 6 32 40 4771 sato dummy 0 2006/11/6/15:38:58(172.16.44.140) Target change 3.W→Al 7 30 48 6965 zhao dummy 0 2006/11/6/17:15:37(130.34.95.31) 0 8 40 48 6937 hashimoto dummy 0 2006/11/6/17:58:20(130.34.95.43) target change 1.Ti ->Au , 5.PZT->Cr 9 18 28 6937 hashimoto dummy 0 2006/11/6/17:59:11(130.34.95.43) Cr/Au at 170℃ 7 24 30 4771 t.sano dummy 0 2006/11/6/18:4:37(172.16.44.140) 0 -8 24 30 4771 sato dummy 0 2006/11/7/10:31:37(130.34.89.180) Al@R.T. 2006/11/7/23:31:52(130.34.89.180) -9 38 48 4404 Lee dummy 0 2006/11/7/19:57:3(130.34.248.193) Cr @R.T. 2006/11/9/18:57:3(130.34.248.193) 8 0 18 4771 K.shibata dummy 0 2006/11/7/23:42:11(130.34.89.180) PZT at 320℃ 8 18 34 6936 kawai dummy 0 2006/11/8/1:5:46(130.34.95.43) PZT@320C 8 34 40 6936 kawai dummy 0 2006/11/8/9:46:23(172.16.44.142) for cooling chamber 9 28 34 6937 hashimoto dummy 0 2006/11/8/23:42:38(172.16.44.140) Cr/Au at 170℃ 10 18 30 6937 hashimoto dummy 0 2006/11/9/11:11:26(172.16.44.140) Cr/Au at 170℃ 9 38 40 4404 Lee dummy 0 2006/11/7/19:57:3(130.34.248.193) Cr @R.T. -10 38 48 4404 Lee dummy 0 2006/11/9/19:2:10(130.34.248.193) Cr at R.T. 2006/11/10/19:32:47(130.34.248.193) 10 38 42 4404 Lee dummy 0 2006/11/9/19:2:10(130.34.248.193) Cr at R.T. 13 24 38 6937 H.Matsuo dummy 1 2006/11/13/12:15:38(172.16.44.140) Re-vacuum up of Main Chamber 14 18 26 6937 hashimoto dummy 0 2006/11/13/20:51:6(130.34.95.43) Cr/Au at 170℃ 14 38 48 4404 Lee dummy 0 2006/11/14/11:14:17(130.34.248.219) Cr @R.T 14 28 33 4771 sato dummy 0 2006/11/14/12:43:2(130.34.95.21) Al@R.T. 15 2 18 4771 K.shibata dummy 0 2006/11/15/1:25:44(130.34.95.21) target change 5. Cr -> PZT bake@320℃ 15 24 28 4771 K.shibata dummy 0 2006/11/15/4:58:32(130.34.95.21) PZT at 320℃ 15 38 48 6925 Yoshinaga dummy 0 2006/11/15/14:47:8(130.34.95.35) ターゲット交換のため大気開放して真空引き -16 26 34 6925 yoshinaga dummy 0 2006/11/15/15:27:14(130.34.95.35) 0 2006/11/15/21:57:12(130.34.95.35) 16 26 34 6925 yoshinaga dummy 0 2006/11/15/21:58:27(130.34.95.35) 320℃　Pt/Ti 16 40 48 4830 M.Otani dummy 0 2006/11/16/0:34:56(130.34.95.30) target change 1.Cu 2.Cr 3.Pt @300degree 17 0 8 4830 M. Otani dummy 0 2006/11/16/0:37:24(130.34.95.30) target change 17 31 39 4830 M. Otani dummy 0 2006/11/16/0:39:26(130.34.95.30) Cr/Cu @300℃ 16 34 40 6937 H.Matsuo dummy 0 2006/11/16/9:31:34(130.34.95.43) Ti/Pt @ 315℃ 17 40 46 6937 D.Satoh dummy 0 2006/11/16/22:40:39(130.34.95.43) Cr 18 38 44 6937 nozawa dummy 0 2006/11/17/13:49:43(130.34.95.43) Cr R.T 20 26 38 4830 M. Otani dummy 0 2006/11/17/19:14:30(172.16.44.142) Cr/Cu @300℃ -21 19 27 4830 M. Otani dummy 0 2006/11/20/19:1:20(130.34.95.30) Cr/Cu @300℃ 2006/11/20/20:39:50(172.16.44.140) 21 32 38 4830 M. Otani dummy 0 2006/11/21/13:18:41(130.34.95.30) Cr/Cu @300℃ 21 30 32 4830 otani dummy 0 2006/11/21/14:46:31(172.16.44.140) 0 21 38 39 4830 otani dummy 0 2006/11/21/18:30:10(172.16.44.142) 0 -28 40 48 5318 A.Ueno dummy 0 2006/11/27/14:29:4(130.34.231.209) Target change 1 Cu 3 Cr 5 Al 2006/11/27/14:29:50(130.34.231.209) 28 40 48 5318 A.Ueno dummy 0 2006/11/27/14:30:36(130.34.231.209) Targer change 1Al 3Cr 5Pt 27 34 40 4830 M.Otani dummy 0 2006/11/27/16:42:56(172.16.44.140) Cr/Cu 300 27 40 48 4830 M.Otani dummy 0 2006/11/27/19:14:0(130.34.95.30) 0 29 26 34 5318 A.Ueno dummy 0 2006/11/28/19:24:46(130.34.231.209) Al@LT 29 34 42 5318 A.Ueno dummy 0 2006/11/29/11:46:50(172.16.44.140) 0 30 20 42 6937 H.Matsuo dummy 1 2006/11/30/10:23:17(172.16.44.140) Vacuum Problem Check 30 42 44 6937 H.Matsuo dummy 0 2006/11/30/20:34:32(172.16.44.140) Ti/Pt @320℃