3	34	48	6908	Kikuchi	dummy	1	2006/8/3/13:13:35(130.34.95.37)	装置立ち下げ
11	19	44	6908	Kikuchi	dummy	0	2006/8/11/9:29:9(130.34.95.37)	0
15	36	44	6909	Kobayasi Risato	dummy	0	2006/8/15/1:14:13(172.16.44.146)	0
-19	18	42	6908	Kikuchi	dummy	0	2006/8/17/16:20:16(130.34.95.37)	0	2006/8/18/21:53:13(130.34.95.37)
21	36	42	6909	Sakaguchi	dummy	0	2006/8/21/13:37:43(172.16.44.142)	p-TEOS CVD使用
22	26	30	6909	Sakaguchi	dummy	0	2006/8/21/15:47:55(130.34.95.37)	p-TEOS CVD使用
22	30	44	6908	Ali	dummy	0	2006/8/21/19:23:26(130.34.95.37)	0
24	22	45	6908	Ali	dummy	0	2006/8/22/13:18:39(130.34.95.37)	0
23	22	38	6909	Sakaguchi	dummy	0	2006/8/22/19:38:42(130.34.95.37)	p-TEOS CVD使用
25	19	44	6908	Kikuchi	dummy	0	2006/8/23/14:1:8(172.16.44.140)	0
23	38	48	6909	Kobayasi Risato	dummy	0	2006/8/23/16:21:24(130.34.95.37)	P-CVD使用
28	22	46	6908	Ali	dummy	0	2006/8/24/21:42:23(130.34.95.37)	0
26	22	28	6909	Sakaguchi	dummy	0	2006/8/24/22:53:14(172.16.44.142)	0
26	32	42	6909	Kobayasi Risato	dummy	0	2006/8/26/15:23:36(130.34.95.37)	P-CVD使用
29	20	46	6909	Sakaguchi	dummy	0	2006/8/28/12:50:4(130.34.95.37)	p-TEOS p-SiN使用
30	29	46	6908	Ali	dummy	0	2006/8/28/16:44:51(172.16.44.142)	0