-1 27 33 6965 wu, sasaki dummy 0 2012/8/30/22:58:31(130.34.95.31) 0 2012/8/31/13:31:53(130.34.95.31) -3 18 24 5810 HE Liang dummy 0 2012/8/31/11:23:27(130.34.95.49) 0 2012/9/3/9:58:17(130.34.95.49) -1 27 34 6965 wu dummy 0 2012/8/31/22:47:23(130.34.95.31) 0 2012/8/31/22:47:30(130.34.95.31) 1 27 34 6965 wu,sasaki dummy 0 2012/8/31/22:47:38(130.34.95.31) 0 3 26 34 6909 S.Kanno dummy 0 2012/9/1/11:10:52(130.34.95.37) 0 3 24 26 6937 N.WANG dummy 0 2012/9/1/15:38:9(130.34.95.43) 0 3 34 39 6937 N.WANG dummy 0 2012/9/1/15:38:40(130.34.95.43) 0 2 27 33 6965 wu,sasaki dummy 0 2012/9/1/17:48:3(130.34.95.31) 0 3 18 22 5810 HE Liang dummy 0 2012/8/31/11:23:27(130.34.95.49) 0 5 20 28 4119 fushimi dummy 0 2012/9/3/16:26:32(130.34.95.44) 0 -5 28 34 6937 Hajika dummy 0 2012/9/3/16:38:26(130.34.95.43) 0 2012/9/5/8:16:37(130.34.95.43) -6 2 14 6937 Hajika, Suzuki dummy 0 2012/9/3/16:39:35(130.34.95.43) 吉田先生承認 2012/9/5/6:9:38(130.34.95.43) -4 20 26 6937 N.WANG dummy 0 2012/9/3/16:42:43(130.34.95.43) 0 2012/9/3/20:41:59(130.34.95.43) 4 15 20 5251 hiroshima dummy 0 2012/9/3/17:22:15(130.34.72.195) 0 -4 21 24 6965 wu dummy 0 2012/9/3/22:44:43(130.34.95.31) 0 2012/9/4/9:28:8(130.34.95.31) 4 23 26 6965 wu dummy 0 2012/9/4/9:28:28(130.34.95.31) 0 5 34 40 6937 N.WANG dummy 0 2012/9/4/15:27:29(130.34.95.43) 0 4 32 35 6965 wu dummy 0 2012/9/4/16:2:39(130.34.95.31) 0 -10 20 28 4119 fushimi dummy 0 2012/9/4/16:19:57(130.34.74.84) 0 2012/9/7/17:58:33(130.34.95.44) -12 20 28 4119 fushimi dummy 0 2012/9/4/16:20:22(130.34.74.84) 0 2012/9/12/11:21:28(130.34.95.44) -11 20 28 4119 yanagimura dummy 0 2012/9/4/16:21:7(130.34.74.84) 0 2012/9/10/14:30:31(130.34.95.44) -6 4 16 6937 Hajika, Suzuki dummy 0 2012/9/5/6:10:1(130.34.95.43) 2 wafers 2012/9/5/7:43:41(130.34.95.43) 6 0 6 6937 Hajika, Suzuki dummy 0 2012/9/5/7:44:56(130.34.95.43) 吉田先生承認 6 26 38 6937 Hajika dummy 0 2012/9/5/7:45:53(130.34.95.43) 2 wafers 5 16 19 6937 chu dummy 0 2012/9/5/7:55:36(130.34.95.43) 0 5 28 34 5810 Yokoyama dummy 1 2012/9/5/10:20:42(130.34.95.49) 0 6 24 26 6937 N.WANG dummy 0 2012/9/5/12:5:21(130.34.95.43) 0 6 20 24 5810 kim dummy 0 2012/9/5/15:23:47(130.34.95.49) 0 7 28 36 4119 fushimi dummy 0 2012/9/5/16:3:2(130.34.63.131) 0 5 40 43 6937 N.WANG dummy 0 2012/9/5/19:24:52(130.34.95.43) time is extended (2nd wafer) 6 38 42 6937 N.WANG dummy 0 2012/9/5/19:59:29(130.34.95.44) 0 6 6 8 6937 Hajika,Suzuki dummy 0 2012/9/6/1:3:19(130.34.95.43) 延長 6 42 48 6908 Y. Ohara, A. Noriki dummy 0 2012/9/6/10:29:9(130.34.95.37) 田中先生 承認済 7 0 2 6908 Y. Ohara, A. Noriki dummy 0 2012/9/6/10:29:34(130.34.95.37) 田中先生 承認済 11 28 36 6965 ohara dummy 0 2012/9/6/13:17:31(130.34.95.31) 0 7 18 24 6937 N.WANG dummy 0 2012/9/6/20:15:30(130.34.95.43) 0 8 27 36 6965 wu,sasaki dummy 0 2012/9/6/22:17:3(130.34.95.31) 0 -7 24 27 5810 seo dummy 0 2012/9/7/9:23:1(130.34.95.49) 0 2012/9/7/10:59:56(130.34.95.49) -12 28 36 5810 kim dummy 0 2012/9/7/11:19:52(130.34.95.49) 0 2012/9/12/11:57:54(130.34.95.43) 7 24 25 6937 N.WANG dummy 0 2012/9/7/11:38:27(130.34.95.43) 0 7 25 28 4771 Phan dummy 0 2012/9/7/11:57:49(130.34.95.21) 0 7 45 48 6908 Y. Ohara, A. Noriki dummy 0 2012/9/7/15:27:39(130.34.95.44) 田中先生 承認済 8 0 4 6908 Y. Ohara, A. Noriki dummy 0 2012/9/7/15:28:10(130.34.95.44) 田中先生 承認済 10 22 30 4119 fushimi dummy 0 2012/9/7/17:59:40(130.34.95.44) 0 7 41 44 5810 seo dummy 0 2012/9/7/20:5:47(130.34.95.49) 0 -9 22 27 6965 ota dummy 0 2012/9/7/22:17:33(130.34.95.31) 0 2012/9/7/22:18:18(130.34.95.31) 9 22 27 6965 ota, hokari dummy 0 2012/9/7/22:19:7(130.34.95.31) 佐々木先生承認 8 39 42 6965 wu,sasaki dummy 0 2012/9/8/18:46:32(130.34.95.31) 0 9 30 34 6965 ota, hokari dummy 0 2012/9/9/15:11:58(130.34.95.43) 0 12 38 45 6965 zhong dummy 0 2012/9/10/10:32:59(130.34.95.31) 0 10 30 33 4119 yanagimura dummy 0 2012/9/10/13:23:57(130.34.95.44) 0 -13 22 30 4119 fushimi dummy 0 2012/9/10/14:12:44(130.34.95.44) 0 2012/9/10/14:14:48(130.34.95.44) 13 28 35 4119 fushimi dummy 0 2012/9/10/14:15:12(130.34.95.44) 0 11 22 28 4119 yanagimura dummy 0 2012/9/10/14:30:50(130.34.95.44) 0 12 46 48 6908 hashiguchi, kigure dummy 0 2012/9/10/19:8:8(130.34.95.37) べー先生承認 13 0 8 6908 hashiguchi, kigure dummy 0 2012/9/10/19:8:32(130.34.95.37) ベー先生承認 11 18 22 6937 hanzawa dummy 0 2012/9/10/20:11:18(130.34.95.43) 0 19 36 48 6937 Hajika dummy 0 2012/9/11/1:42:22(130.34.95.43) 2 wafers 14 26 34 6937 Hajika dummy 0 2012/9/11/4:36:59(130.34.95.43) 0 14 20 26 4119 fushimi dummy 0 2012/9/11/9:6:37(130.34.63.131) 0 13 18 22 6965 ohara dummy 0 2012/9/11/22:5:18(130.34.95.43) 0 12 1 6 6965 ohara dummy 0 2012/9/12/0:5:6(130.34.95.31) 0 -12 6 12 6965 endo ,sasaki dummy 0 2012/9/12/0:10:34(130.34.95.31) 金森先生承認 2012/9/12/3:2:50(130.34.95.43) 12 6 9 6965 endo ,sasaki dummy 0 2012/9/12/0:10:34(130.34.95.31) 金森先生承認 12 9 15 6965 endo dummy 0 2012/9/12/3:49:6(130.34.95.43) 延長 -12 15 20 6965 endo dummy 0 2012/9/12/6:17:45(130.34.95.43) 計3枚 2012/9/12/6:46:14(130.34.95.44) 12 15 16 6965 endo dummy 0 2012/9/12/6:17:45(130.34.95.43) 計3枚 -12 36 38 5810 kim dummy 0 2012/9/12/10:41:19(130.34.95.43) extension 2012/9/12/11:58:2(130.34.95.43) 12 20 25 4119 fushimi dummy 0 2012/9/4/16:20:22(130.34.74.84) 0 -12 30 38 5810 kim dummy 0 2012/9/12/11:58:22(130.34.95.43) 0 2012/9/12/16:41:53(130.34.95.43) 13 35 40 6937 hanzawa dummy 0 2012/9/12/13:58:14(130.34.95.43) 0 12 30 36 5810 kim dummy 0 2012/9/12/11:58:22(130.34.95.43) 0 13 40 44 5810 kim dummy 0 2012/9/12/17:2:12(130.34.95.49) 0 -14 36 44 5810 kim dummy 0 2012/9/12/17:2:35(130.34.95.49) 0 2012/9/14/1:23:7(130.34.95.49) 12 45 46 6937 nishino dummy 0 2012/9/12/20:32:23(130.34.95.43) 0 13 22 24 6937 nishino dummy 0 2012/9/12/22:30:17(130.34.95.44) 0 13 16 18 6937 chu dummy 0 2012/9/13/7:11:48(130.34.95.43) 0 13 26 28 6965 ohara dummy 0 2012/9/13/9:43:36(130.34.95.44) 0 13 44 46 6937 nishino dummy 0 2012/9/13/12:10:16(130.34.95.43) 0 -18 22 28 4119 fushimi dummy 0 2012/9/13/14:55:56(130.34.95.44) 0 2012/9/13/14:56:41(130.34.95.44) -18 22 28 4119 fushimi dummy 0 2012/9/13/14:57:2(130.34.95.44) 0 2012/9/13/14:57:38(130.34.95.44) -18 22 26 4119 fushimi dummy 0 2012/9/13/14:57:59(130.34.95.44) 0 2012/9/13/14:58:22(130.34.95.44) -17 20 26 4119 fushimi dummy 0 2012/9/13/14:59:5(130.34.95.44) 0 2012/9/13/16:24:58(130.34.95.44) -17 28 35 6965 D.Sato dummy 0 2012/9/13/15:48:18(130.34.95.31) 0 2012/9/13/16:50:6(130.34.95.31) -18 20 27 4119 fushimi dummy 0 2012/9/13/16:25:16(130.34.95.44) 0 2012/9/18/11:59:9(130.34.95.44) 18 28 35 6965 D.Sato dummy 0 2012/9/13/16:50:32(130.34.95.31) 0 -14 44 48 6908 hashiguchi dummy 0 2012/9/13/18:24:41(130.34.95.44) ベー先生承認 2012/9/13/18:25:43(130.34.95.44) -15 0 6 6908 hashiguchi,kigure dummy 0 2012/9/13/18:25:28(130.34.95.44) ベー先生承認 2012/9/13/18:26:51(130.34.95.44) -14 44 48 6908 hashiguchi,kigure dummy 0 2012/9/13/18:26:10(130.34.95.44) ベー先生承認 2012/9/14/1:30:33(130.34.95.37) -15 0 6 6908 hashiguchi, kigure dummy 0 2012/9/13/18:27:20(130.34.95.44) 2 wafers 2012/9/14/15:53:20(130.34.95.44) 14 0 3 6908 Y. Ohara, H. Hashiguchi dummy 0 2012/9/13/21:23:2(130.34.63.131) 田中先生 承認済 14 34 44 6908 hashiguchi dummy 0 2012/9/14/1:30:29(130.34.95.37) 0 -19 18 26 4119 nagai dummy 0 2012/9/14/8:56:43(130.34.74.84) 0 2012/9/19/8:51:55(130.34.74.84) -19 28 36 5810 kim dummy 0 2012/9/14/11:17:50(130.34.95.49) 0 2012/9/14/14:57:40(130.34.95.49) -15 20 22 6909 az dummy 0 2012/9/14/12:4:18(130.34.95.44) 0 2012/9/14/12:4:22(130.34.95.44) 17 20 24 6965 ohara dummy 0 2012/9/14/14:49:45(130.34.95.31) 0 -19 28 35 4119 fushimi dummy 0 2012/9/14/16:11:36(130.34.63.131) 0 2012/9/19/11:56:16(130.34.63.131) 14 44 48 6908 hashiguchi, kigure dummy 0 2012/9/14/19:7:55(130.34.95.44) ベー先生承認 15 43 47 6908 Y. Ohara, A. Noriki dummy 0 2012/9/15/19:35:35(130.34.95.37) 田中先生 承認済 17 28 36 6908 tanikawa, hashiguchi dummy 0 2012/9/16/3:35:39(130.34.95.37) 田中先生承認 16 43 45 6937 Chu,Nishino dummy 0 2012/9/17/0:22:54(130.34.95.43) with Lin-san's permission 17 24 27 6965 ohara dummy 0 2012/9/17/10:57:50(130.34.95.31) 佐々木先生承認 18 35 44 6908 tanikawa dummy 0 2012/9/17/14:21:34(130.34.95.37) 0 17 40 48 6908 hashiguchi, tanikawa dummy 0 2012/9/17/16:25:9(130.34.95.44) べー先生 18 8 14 6937 hanzawa dummy 0 2012/9/18/1:8:8(130.34.95.43) 0 20 16 24 5810 kim dummy 0 2012/9/18/11:14:27(130.34.95.43) 0 18 20 26 4119 fushimi dummy 0 2012/9/13/16:25:16(130.34.95.44) 0 -21 28 35 4119 fushimi dummy 0 2012/9/18/13:7:25(130.34.95.44) 0 2012/9/19/8:24:48(130.34.95.44) 21 28 37 4119 fushimi dummy 0 2012/9/19/8:25:39(130.34.95.44) 0 19 18 20 4119 nagai dummy 0 2012/9/14/8:56:43(130.34.74.84) 0 -20 34 42 5810 Xue dummy 0 2012/9/19/10:24:54(130.34.95.49) 0 2012/9/19/20:58:26(130.34.95.49) -21 22 28 4119 satake dummy 0 2012/9/19/10:42:49(130.34.95.44) 0 2012/9/20/9:22:51(130.34.63.131) 19 28 36 4119 fushimi dummy 0 2012/9/19/11:56:29(130.34.63.131) 0 -20 26 31 6937 hirayanagi dummy 0 2012/9/19/15:7:12(130.34.95.43) 0 2012/9/19/15:8:21(130.34.95.43) -20 28 36 6908 tanikawa dummy 0 2012/9/19/22:0:24(130.34.95.44) 0 2012/9/20/4:48:51(130.34.95.44) -20 36 41 6937 hirayanagi dummy 0 2012/9/19/22:1:45(130.34.95.43) 0 2012/9/20/10:14:36(130.34.95.43) 25 40 47 6937 Hajika dummy 0 2012/9/19/22:5:24(130.34.95.44) 0 -27 36 48 6937 Hajika dummy 0 2012/9/19/22:6:40(130.34.95.44) 2 wafers 2012/9/19/22:8:39(130.34.95.44) -26 40 47 6937 Hajika dummy 0 2012/9/19/22:9:3(130.34.95.44) 0 2012/9/26/3:17:15(130.34.95.43) -29 0 12 6937 Hajika, Suzuki dummy 0 2012/9/19/22:17:18(130.34.95.44) 吉田先生承認, 2 wafers 2012/9/26/5:8:35(130.34.95.43) 20 1 2 6937 chu dummy 0 2012/9/20/1:2:10(130.34.95.43) 0 -20 28 36 6908 tanikawa dummy 0 2012/9/20/4:55:36(130.34.95.44) 0 2012/9/20/5:29:34(130.34.95.37) -21 16 22 6908 tanikawa dummy 0 2012/9/20/5:30:15(130.34.95.37) 0 2012/9/20/23:4:28(130.34.63.131) 20 12 16 6937 hanzawa dummy 0 2012/9/20/5:52:18(130.34.95.43) 0 20 26 30 6937 hirayanagi dummy 0 2012/9/20/10:14:50(130.34.95.43) 0 20 30 31 6937 hirayanagi dummy 0 2012/9/20/10:15:17(130.34.95.43) 0 -20 40 48 6908 Y. Ohara, A. Noriki dummy 0 2012/9/20/11:51:49(130.34.95.37) 田中先生 承認済 2012/9/20/18:6:22(130.34.95.44) 26 26 30 4771 chiba dummy 0 2012/9/20/13:59:20(130.34.95.21) 0 21 22 28 4119 satake dummy 0 2012/9/20/15:9:23(130.34.95.44) 0 21 38 47 6908 Y. Ohara, A. Noriki dummy 0 2012/9/20/23:1:51(130.34.95.37) 田中先生 承認済 -22 28 36 6908 tanikawa dummy 0 2012/9/20/23:4:21(130.34.63.131) 0 2012/9/21/1:3:19(130.34.95.37) 22 16 20 6908 tanikawa dummy 0 2012/9/21/1:3:10(130.34.95.37) 0 22 28 32 6908 tanikawa dummy 0 2012/9/21/1:3:36(130.34.95.37) 0 22 32 37 5810 tanaka dummy 0 2012/9/21/12:37:39(130.34.95.49) with inomata, permitted by miyashita -23 28 36 4119 fushimi,yanagimura dummy 0 2012/9/21/16:52:54(130.34.95.44) 福島先生承認済み 2012/9/21/16:53:25(130.34.95.44) -23 28 36 4119 fushimi,motoyoshi dummy 0 2012/9/21/16:54:29(130.34.95.44) 福島先生承認済み 2012/9/22/13:3:37(130.34.95.44) -22 20 28 4119 fushimi,motoyoshi dummy 0 2012/9/21/17:25:21(130.34.95.44) 0 2012/9/21/17:25:26(130.34.95.44) 22 20 28 4119 fushimi,motoyoshi dummy 0 2012/9/21/17:26:5(130.34.95.44) 福島先生承認済み 23 28 37 4119 fushimi,motoyoshi dummy 0 2012/9/22/13:4:13(130.34.95.44) 福島先生承認済み 25 28 31 5810 tanaka dummy 0 2012/9/22/15:12:52(130.34.95.49) 0 -26 21 24 5810 tanaka dummy 0 2012/9/22/15:13:20(130.34.95.49) 0 2012/9/25/12:59:7(130.34.95.49) -28 21 24 5810 tanaka dummy 0 2012/9/22/15:13:49(130.34.95.49) 0 2012/9/27/8:29:7(130.34.95.49) 23 2 20 6908 tanikawa dummy 0 2012/9/23/0:46:6(130.34.95.37) 木野先生承認 夜通し真空引きを行います 23 20 27 6937 chu dummy 0 2012/9/23/8:32:27(130.34.95.43) with Lin-san's permission 25 31 38 4119 fushimi dummy 0 2012/9/23/11:4:20(130.34.63.131) 0 23 45 48 6937 Chu,Nishino dummy 0 2012/9/23/22:26:8(130.34.95.44) with Lin-san's permission -26 30 38 4119 fushimi dummy 0 2012/9/24/9:59:0(130.34.74.84) 0 2012/9/25/15:28:33(130.34.95.44) -24 36 44 5810 Xue dummy 0 2012/9/24/12:37:52(130.34.95.49) 0 2012/9/24/19:51:9(130.34.95.43) -25 23 28 6965 ota dummy 0 2012/9/24/13:19:27(130.34.95.43) 0 2012/9/25/10:25:39(130.34.95.31) 27 33 36 6965 ohara dummy 0 2012/9/24/17:34:16(130.34.95.31) 0 28 31 36 6965 ohara dummy 0 2012/9/24/18:7:47(130.34.95.31) 0 -27 20 28 5810 xue dummy 0 2012/9/24/19:50:57(130.34.95.43) 0 2012/9/27/8:42:55(130.34.95.49) 24 36 42 5810 Xue dummy 0 2012/9/24/12:37:52(130.34.95.49) 0 25 14 20 6937 hanzawa dummy 0 2012/9/24/22:24:19(130.34.95.43) 0 -28 24 31 4119 fushimi dummy 0 2012/9/25/9:47:13(130.34.63.131) 0 2012/9/27/10:17:59(130.34.95.44) 25 21 26 6965 ota dummy 0 2012/9/25/10:25:46(130.34.95.31) 0 -27 28 33 4119 satake dummy 0 2012/9/25/11:3:49(130.34.95.44) 0 2012/9/27/10:17:31(130.34.95.44) 26 22 25 5810 tanaka dummy 0 2012/9/25/12:59:36(130.34.95.49) 0 27 36 42 4771 sugimoto dummy 1 2012/9/25/15:27:46(130.34.95.21) 0 -26 36 40 5810 kim dummy 0 2012/9/25/17:13:57(130.34.95.49) 0 2012/9/26/11:2:26(130.34.95.43) 26 31 36 6937 hirayanagi dummy 0 2012/9/25/22:37:29(130.34.95.43) 0 26 40 48 6937 Hajika dummy 0 2012/9/26/5:0:15(130.34.95.43) 2 wafers 27 0 4 6937 Hajika, Suzuki dummy 0 2012/9/26/5:0:47(130.34.95.43) 吉田先生承認 -29 0 6 6937 Hajika, Suzuki dummy 0 2012/9/26/5:9:14(130.34.95.43) 吉田先生承認 2012/9/28/15:54:20(130.34.95.43) 27 42 48 6937 hanzawa dummy 0 2012/9/26/10:32:0(130.34.95.43) 0 28 0 6 6937 hanzawa dummy 0 2012/9/26/10:33:5(130.34.95.43) 180min etching 27 11 20 4771 chiba dummy 0 2012/9/26/18:10:5(130.34.95.21) 原先生承認済み -28 13 21 6908 tanikawa dummy 0 2012/9/26/18:21:17(130.34.95.37) 0 2012/9/27/19:45:50(130.34.63.131) 29 28 32 5810 tanaka dummy 0 2012/9/27/8:29:30(130.34.95.49) 0 -27 26 33 4119 fushimi dummy 0 2012/9/27/10:17:43(130.34.95.44) 0 2012/9/27/14:27:50(130.34.95.44) 28 6 12 6965 endo dummy 0 2012/9/27/13:39:54(130.34.95.43) 金森先生承認 27 26 31 4119 fushimi dummy 0 2012/9/27/10:17:43(130.34.95.44) 0 28 26 31 6965 T.Sasaki dummy 0 2012/9/27/17:12:25(130.34.95.31) 0 28 36 42 6965 Sakaki, Sasaki dummy 0 2012/9/27/17:30:38(130.34.95.31) 0 -29 14 20 6908 tanikawa dummy 0 2012/9/27/18:15:22(130.34.63.131) 0 2012/9/27/19:46:5(130.34.63.131) -28 43 48 6937 hirayanagi dummy 0 2012/9/27/18:47:39(130.34.95.43) 0 2012/9/27/18:50:4(130.34.95.43) 29 14 20 6908 tanikawa dummy 0 2012/9/27/19:46:30(130.34.63.131) 0 28 14 19 6937 hirayanagi dummy 0 2012/9/28/1:44:26(130.34.95.43) 0 29 20 28 5810 He and Xue dummy 0 2012/9/28/10:50:30(130.34.95.49) 0 -29 4 10 6937 Hajika, Suzuki dummy 0 2012/9/28/15:54:48(130.34.95.43) 吉田先生承認 2012/9/29/0:28:44(130.34.95.5) 29 32 40 6908 hashiguhci, kigure dummy 0 2012/9/28/16:55:10(130.34.95.37) 0 28 42 48 6937 nishino dummy 0 2012/9/28/17:5:8(130.34.95.43) 0 29 0 3 6937 nishino dummy 0 2012/9/28/20:20:46(130.34.95.43) 0 29 7 14 6937 Hajika, Suzuki dummy 0 2012/9/29/0:29:21(130.34.95.5) 吉田先生承認 29 40 44 6908 hashiguchi, kigure dummy 0 2012/9/29/18:14:19(130.34.95.44) 0 30 26 34 6937 hirayanagi,nishino dummy 0 2012/9/29/19:49:44(130.34.95.43) 0