4	26	40	6937	Hajika	dummy	0	2012/11/27/23:2:17(130.34.95.43)	2 wafers
3	36	42	5810	Xue	dummy	0	2012/11/28/10:5:10(130.34.95.49)	0
-3	18	26	4119	satake	dummy	0	2012/11/28/10:31:31(130.34.95.44)	0	2012/11/28/10:32:50(130.34.95.44)
-3	26	36	4119	satake	dummy	0	2012/11/28/10:33:57(130.34.95.44)	0	2012/11/28/10:35:15(130.34.95.44)
-3	26	36	4119	satake	dummy	0	2012/11/28/10:35:40(130.34.95.44)	2wafers	2012/11/30/14:1:55(130.34.95.44)
3	16	26	4771	yoshida	dummy	0	2012/11/28/17:23:50(130.34.95.21)	2 wafers
-4	17	22	6937	hayasaka	dummy	0	2012/11/29/20:3:28(130.34.95.43)	0	2012/11/30/19:45:59(130.34.95.43)
-3	26	34	4119	satake	dummy	0	2012/11/30/14:2:6(130.34.95.44)	0	2012/11/30/14:2:32(130.34.95.44)
3	27	35	4119	satake	dummy	0	2012/11/30/14:2:42(130.34.95.44)	0
-5	18	36	6937	F.Kurth	dummy	0	2012/11/30/14:14:20(130.34.95.43)	0	2012/12/3/17:25:2(130.34.95.43)
4	16	21	6937	hayasaka	dummy	0	2012/11/30/19:46:23(130.34.95.43)	0
3	26	27	4771	yoshida	dummy	0	2012/11/30/23:25:53(130.34.95.21)	0
-1	36	44	6909	yukaito, hashiguchi	dummy	0	2012/12/1/9:35:23(130.34.95.37)	木野先生承認	2012/12/1/19:27:31(130.34.95.37)
1	28	30	5810	seo	dummy	0	2012/12/1/13:36:1(130.34.95.43)	戸田先生承認
4	21	26	6937	Froemel	dummy	0	2012/12/1/13:50:2(130.34.95.43)	0
3	43	48	6908	hashiguchi, kigure	dummy	0	2012/12/1/18:27:22(130.34.95.37)	ベー先生承認
4	0	5	6908	hashiguchi, kigure	dummy	0	2012/12/1/18:28:0(130.34.95.37)	0
-4	41	48	6908	hashiguchi, kigure	dummy	0	2012/12/1/19:15:22(130.34.95.37)	ベー先生承認	2012/12/4/7:38:58(130.34.95.37)
1	36	41	6909	yukaito, hashiguchi	dummy	0	2012/12/1/9:35:23(130.34.95.37)	木野先生承認
-2	24	36	6909	yukaito	dummy	0	2012/12/1/21:37:51(130.34.95.44)	0	2012/12/2/11:34:56(130.34.95.37)
2	24	26	6909	yukaito	dummy	0	2012/12/1/21:37:51(130.34.95.44)	0
-5	36	44	6909	yukaito	dummy	0	2012/12/2/11:35:36(130.34.95.37)	0	2012/12/3/16:6:20(130.34.95.37)
-6	18	28	4771	he	dummy	0	2012/12/2/12:44:51(130.34.95.21)	0	2012/12/3/15:49:20(130.34.95.21)
-2	29	37	6909	yukaito	dummy	0	2012/12/2/13:15:52(130.34.95.37)	0	2012/12/2/13:15:56(130.34.95.37)
-2	29	37	6909	yukaito, hashiguchi	dummy	0	2012/12/2/13:16:29(130.34.95.37)	木野先生承認	2012/12/2/13:20:53(130.34.95.37)
-2	31	37	6909	yukaito, hashiguchi	dummy	0	2012/12/2/13:21:42(130.34.95.37)	木野先生承認	2012/12/2/15:24:27(130.34.95.44)
2	31	33	6909	yukaito, hashiguchi	dummy	0	2012/12/2/13:21:42(130.34.95.37)	木野先生承認
5	44	48	6909	yukaito, hashiguchi	dummy	0	2012/12/2/15:40:18(130.34.95.44)	木野先生承認
6	37	43	5810	Xue	dummy	0	2012/12/3/10:26:57(130.34.95.49)	0
6	28	34	4771	yoshida	dummy	0	2012/12/3/10:34:21(130.34.95.21)	0
5	14	18	4119	konno	dummy	0	2012/12/3/11:23:14(130.34.63.131)	0
-6	14	18	4119	konno	dummy	0	2012/12/3/11:23:29(130.34.63.131)	0	2012/12/5/13:22:25(130.34.95.44)
-7	16	24	4119	yabata	dummy	0	2012/12/3/11:23:50(130.34.63.131)	0	2012/12/5/13:22:30(130.34.95.44)
-7	24	34	4119	watanabe	dummy	0	2012/12/3/11:24:15(130.34.63.131)	3times	2012/12/5/13:22:34(130.34.95.44)
6	34	37	4771	yoshida	dummy	0	2012/12/3/13:35:34(130.34.95.21)	0
-6	18	28	4771	he	dummy	0	2012/12/3/15:49:54(130.34.95.21)	400um SiO2 etching	2012/12/3/15:54:12(130.34.95.21)
-6	18	28	4771	he	dummy	0	2012/12/3/15:54:38(130.34.95.21)	400um Si etching	2012/12/5/20:54:34(130.34.95.21)
-5	36	44	4119	konno	dummy	0	2012/12/3/16:6:31(130.34.95.37)	0	2012/12/5/14:8:7(130.34.95.44)
5	18	36	6937	F.Kurth	dummy	0	2012/12/3/17:25:14(130.34.95.43)	Large opened silicon surface, slow etch rate
-4	10	16	6937	Nishino	dummy	0	2012/12/3/18:11:20(130.34.95.43)	0	2012/12/3/20:9:44(130.34.95.43)
4	9	15	6937	Nishino	dummy	0	2012/12/3/20:10:5(130.34.95.43)	0
-7	35	43	6937	Kojima	dummy	0	2012/12/3/20:31:41(130.34.95.43)	0	2012/12/3/20:58:42(130.34.95.43)
7	35	43	6937	Kojima	dummy	0	2012/12/3/20:59:2(130.34.95.43)	0
6	43	45	5810	xue	dummy	0	2012/12/3/21:13:31(130.34.95.44)	0
-26	26	44	6937	Kochhar	dummy	0	2012/12/3/21:20:4(130.34.95.43)	2 wafers	2012/12/26/19:16:2(130.34.95.43)
-8	30	36	5810	Ka	dummy	0	2012/12/3/23:6:9(130.34.95.49)	0	2012/12/3/23:6:15(130.34.95.49)
-8	30	38	5810	Ka	dummy	0	2012/12/3/23:6:31(130.34.95.49)	0	2012/12/3/23:6:37(130.34.95.49)
5	4	12	6937	Hajika	dummy	0	2012/12/3/23:6:39(130.34.95.43)	吉田先生承認
8	30	38	5810	Ka	dummy	0	2012/12/3/23:6:55(130.34.95.49)	Toda sensei's permission
4	5	7	6965	endo	dummy	0	2012/12/4/1:38:37(130.34.95.43)	佐々木先生承認
4	40	48	6908	hashiguchi, kigure	dummy	0	2012/12/4/7:39:24(130.34.95.37)	0
5	0	4	6908	hashiguchi, kigure	dummy	0	2012/12/4/7:40:25(130.34.95.37)	ベー先生承認
10	16	21	6937	hayasaka	dummy	0	2012/12/4/10:2:46(130.34.95.43)	0
-6	0	8	6908	hashiguchi, tanikawa	dummy	0	2012/12/4/13:55:21(130.34.95.37)	0	2012/12/4/13:55:32(130.34.95.37)
-6	0	8	6908	hashiguchi, tanikawa	dummy	0	2012/12/4/13:56:39(130.34.95.37)	ベー先生承認	2012/12/4/17:46:36(130.34.95.44)
5	12	14	6908	hashiguchi, tanikawa	dummy	0	2012/12/4/15:57:2(130.34.95.37)	ベー先生承認
-6	0	14	6908	hashiguchi, kigure	dummy	0	2012/12/4/17:47:9(130.34.95.44)	ベー先生承認	2012/12/5/22:44:24(130.34.95.44)
6	45	48	6965	Hayakawa	dummy	0	2012/12/4/20:3:12(130.34.95.31)	0
-7	43	46	5810	Yokoyama	dummy	0	2012/12/4/20:28:16(130.34.95.49)	0	2012/12/7/17:17:17(130.34.95.43)
-10	21	28	5810	Yokoyama	dummy	0	2012/12/4/20:31:42(130.34.95.49)	0	2012/12/7/19:15:57(130.34.95.49)
-10	36	48	5810	iizuka	dummy	0	2012/12/4/20:44:24(130.34.95.49)	600um etching	2012/12/10/10:4:48(130.34.95.49)
-7	0	10	6908	hashiguchi, kigure	dummy	0	2012/12/4/21:27:31(130.34.95.44)	ベー先生承認ｖ	2012/12/5/3:28:9(130.34.95.37)
9	20	26	6965	ohara	dummy	0	2012/12/5/2:3:13(130.34.95.43)	佐々木先生承認
-7	0	16	6908	hashiguhim kigure	dummy	0	2012/12/5/3:29:21(130.34.95.37)	サンプル3枚,ベー先生承認	2012/12/6/17:18:44(130.34.95.37)
-13	29	33	5810	tanaka	dummy	0	2012/12/5/11:7:49(130.34.95.49)	0	2012/12/13/12:45:3(130.34.95.44)
-10	29	33	5810	tanaka	dummy	0	2012/12/5/11:8:29(130.34.95.49)	0	2012/12/10/10:4:42(130.34.95.49)
-8	38	43	6909	yukaito	dummy	0	2012/12/5/13:6:34(130.34.95.37)	0	2012/12/5/13:6:42(130.34.95.37)
8	38	43	6909	yukaito, hashiguchi	dummy	0	2012/12/5/13:7:15(130.34.95.37)	木野先生承認
7	18	32	5810	seo	dummy	0	2012/12/5/14:52:16(130.34.95.43)	2 wafer
5	36	44	6908	hashiguchi	dummy	0	2012/12/5/16:45:27(130.34.95.44)	0
-8	11	17	6937	Nishino	dummy	0	2012/12/5/17:7:5(130.34.95.43)	田中先生承認	2012/12/5/20:18:56(130.34.95.43)
-6	14	18	6965	ohara	dummy	0	2012/12/5/17:36:2(130.34.95.31)	0	2012/12/5/22:44:41(130.34.95.31)
12	28	36	5810	kim	dummy	0	2012/12/5/19:58:41(130.34.95.49)	0
8	10	16	6937	Nishino	dummy	0	2012/12/5/20:19:18(130.34.95.43)	0
-11	20	28	5810	Xue	dummy	0	2012/12/5/20:35:29(130.34.95.49)	0	2012/12/10/20:24:0(130.34.95.43)
6	21	28	6965	ohara	dummy	0	2012/12/5/22:45:0(130.34.95.31)	0
-11	28	34	6937	Hajika	dummy	0	2012/12/6/3:11:27(130.34.95.43)	0	2012/12/10/20:24:18(130.34.95.43)
-7	32	35	5810	HE Liang	dummy	0	2012/12/6/8:14:19(130.34.95.49)	0	2012/12/7/10:6:10(130.34.95.49)
-9	32	38	5810	tanahashi	dummy	0	2012/12/6/14:45:54(130.34.95.49)	ono sensei permission	2012/12/9/13:20:40(130.34.95.49)
7	0	1	6965	Hayakawa	dummy	0	2012/12/6/17:24:28(130.34.95.31)	0
-10	33	36	5810	M.Toda	dummy	0	2012/12/7/9:6:31(130.34.95.49)	0	2012/12/10/10:4:45(130.34.95.49)
-8	2	5	6937	hirayanagi	dummy	0	2012/12/7/10:12:10(130.34.95.43)	吉田先生承認	2012/12/7/11:27:48(130.34.95.43)
7	32	35	5810	seo	dummy	0	2012/12/7/10:28:14(130.34.95.44)	0
-11	14	20	5810	kim	dummy	0	2012/12/7/11:14:28(130.34.95.49)	0	2012/12/10/19:48:58(130.34.95.43)
-7	46	48	6937	hirayanagi	dummy	0	2012/12/7/11:28:13(130.34.95.43)	吉田先生承認	2012/12/7/11:28:31(130.34.95.43)
7	46	48	6937	hirayanagi	dummy	0	2012/12/7/11:29:6(130.34.95.43)	吉田先生承認
8	0	1	6937	hirayanagi	dummy	0	2012/12/7/11:29:31(130.34.95.43)	吉田先生承認
8	16	24	6937	F.Kurth	dummy	0	2012/12/7/13:43:12(130.34.95.43)	0
7	43	46	5810	yokoyama	dummy	0	2012/12/7/17:19:3(130.34.95.43)	0
12	36	48	5810	hayashi	dummy	0	2012/12/7/18:45:39(130.34.95.49)	600um etching
-10	24	27	5810	Yokoyama	dummy	0	2012/12/7/19:16:6(130.34.95.49)	0	2012/12/10/10:4:34(130.34.95.49)
12	22	28	5810	Yokoyama	dummy	0	2012/12/7/19:16:26(130.34.95.49)	0
11	35	42	6937	Kojima	dummy	0	2012/12/7/20:15:42(130.34.95.43)	0
-10	27	29	6937	hirayanagi	dummy	0	2012/12/8/7:32:34(130.34.95.43)	0	2012/12/8/8:8:49(130.34.95.43)
-11	8	14	5810	HE Liang	dummy	0	2012/12/8/17:51:21(130.34.95.43)	川合先生確認	2012/12/10/19:37:37(130.34.95.43)
-11	0	8	5810	Ka	dummy	0	2012/12/8/18:35:49(130.34.95.49)	Toda sensei's permission	2012/12/10/18:5:0(130.34.95.49)
13	20	26	5810	tanahashi	dummy	0	2012/12/9/13:22:35(130.34.95.49)	0
-10	21	24	5810	Toan	dummy	0	2012/12/10/9:13:48(130.34.95.49)	0	2012/12/10/10:4:31(130.34.95.49)
13	15	20	6937	hayasaka	dummy	0	2012/12/10/10:3:36(130.34.95.43)	0
10	21	23	5810	Toan	dummy	0	2012/12/10/9:13:48(130.34.95.49)	0
10	23	48	5810	担当者	dummy	1	2012/12/10/10:5:5(130.34.95.49)	0
13	33	38	6937	Froemel	dummy	0	2012/12/10/10:28:10(130.34.95.43)	0
14	20	25	6937	Froemel	dummy	0	2012/12/10/10:28:27(130.34.95.43)	0
-12	17	22	5810	Xue	dummy	0	2012/12/10/10:53:33(130.34.95.49)	0	2012/12/10/17:3:34(130.34.95.49)
-13	38	43	5810	Xue	dummy	0	2012/12/10/10:54:11(130.34.95.49)	0	2012/12/10/20:24:9(130.34.95.43)
-14	25	30	5810	tanaka	dummy	0	2012/12/10/11:14:28(130.34.95.49)	0	2012/12/13/17:13:15(130.34.95.49)
-14	30	42	5810	iizuka	dummy	0	2012/12/10/13:25:3(130.34.95.49)	500um etching	2012/12/12/13:28:53(130.34.95.49)
11	42	46	6965	ohara	dummy	0	2012/12/10/14:7:30(130.34.95.31)	佐々木先生承認
17	32	39	5810	M.Toda	dummy	0	2012/12/10/14:13:39(130.34.95.49)	0
-13	43	46	5810	Xue	dummy	0	2012/12/10/17:4:8(130.34.95.49)	0	2012/12/10/20:24:13(130.34.95.43)
12	14	22	6937	F.Kurth	dummy	0	2012/12/10/18:45:5(130.34.95.43)	0
13	28	29	5810	tanaka	dummy	0	2012/12/10/19:3:40(130.34.95.49)	0
-14	42	48	5810	kim	dummy	0	2012/12/10/19:41:19(130.34.95.43)	kawai sensei`s permission	2012/12/14/13:17:32(130.34.95.49)
-15	0	2	5810	kim	dummy	0	2012/12/10/19:41:45(130.34.95.43)	extension	2012/12/14/13:17:42(130.34.95.49)
11	28	35	6937	Hajika	dummy	0	2012/12/10/20:31:28(130.34.95.43)	0
14	0	14	6937	Hajika	dummy	0	2012/12/10/20:35:18(130.34.95.43)	2 wafers, 吉田先生承認
11	23	28	5810	Toan	dummy	0	2012/12/10/20:52:57(130.34.95.49)	0
-11	16	23	5810	Ka	dummy	0	2012/12/10/22:44:40(130.34.95.49)	0	2012/12/11/8:16:38(130.34.95.43)
-11	12	16	5810	HE Liang and Ka	dummy	0	2012/12/11/1:2:31(130.34.95.43)	川合先生確認	2012/12/11/1:12:3(130.34.95.43)
11	14	16	5810	HE Liang and Ka	dummy	0	2012/12/11/5:36:0(130.34.95.44)	川合先生確認
11	16	19	5810	Ka	dummy	0	2012/12/10/22:44:40(130.34.95.49)	0
-17	21	29	5810	Xue	dummy	0	2012/12/11/8:18:5(130.34.95.49)	0	2012/12/12/14:34:3(130.34.95.49)
11	19	23	5810	Yokoyama	dummy	0	2012/12/11/9:12:1(130.34.95.49)	0
-13	38	46	5810	Ka	dummy	0	2012/12/11/9:26:19(130.34.95.49)	0	2012/12/11/9:26:44(130.34.95.49)
-13	38	45	5810	Ka	dummy	0	2012/12/11/9:26:57(130.34.95.49)	0	2012/12/11/12:37:2(130.34.95.49)
12	10	14	6937	Nishino	dummy	0	2012/12/11/9:59:32(130.34.95.43)	0
-17	39	46	5810	Yokoyama	dummy	0	2012/12/11/11:46:26(130.34.95.49)	戸田先生承認	2012/12/17/20:34:55(130.34.95.44)
13	0	5	5810	Toan, Ka	dummy	0	2012/12/11/12:12:7(130.34.95.44)	Ono sensei's permission
-13	38	48	5810	Toan	dummy	0	2012/12/11/13:1:23(130.34.95.44)	Ono sensei's permission	2012/12/12/8:35:21(130.34.95.49)
12	6	10	5810	HE Liang	dummy	0	2012/12/11/13:34:21(130.34.95.49)	川合先生確認
-14	14	20	5810	HE Liang	dummy	0	2012/12/11/13:41:23(130.34.95.49)	川合先生確認	2012/12/13/17:2:30(130.34.95.43)
13	26	28	5810	An	dummy	0	2012/12/11/14:51:37(130.34.95.49)	0
11	46	48	6937	hirayanagi	dummy	0	2012/12/11/16:20:34(130.34.95.43)	吉田先生承認
13	10	15	6965	ohara	dummy	0	2012/12/11/21:7:37(130.34.95.44)	0
-15	28	31	5810	tanaka	dummy	0	2012/12/11/21:26:52(130.34.95.49)	inomata, permitted by kawai	2012/12/14/18:53:30(130.34.95.49)
12	0	1	6937	hirayanagi	dummy	0	2012/12/11/23:24:0(130.34.95.44)	延長
-12	1	4	4771	Minh+ Wang san	dummy	0	2012/12/11/23:34:48(130.34.95.21)	Prof. Kuwano's permission	2012/12/11/23:35:5(130.34.95.21)
12	1	6	4771	Minh+ Wang san	dummy	0	2012/12/11/23:35:34(130.34.95.21)	Prof. Kuwano's permission
-15	31	40	6937	Shinya Yoshida, Muroyama	dummy	0	2012/12/12/0:39:20(130.34.95.43)	0	2012/12/13/12:59:41(130.34.95.43)
-13	38	48	5810	HE Liang	dummy	0	2012/12/12/9:28:44(130.34.95.49)	川合先生確認	2012/12/12/23:57:41(130.34.95.44)
-14	30	36	5810	tanahashi	dummy	0	2012/12/12/13:33:41(130.34.95.49)	0	2012/12/12/13:39:42(130.34.95.49)
15	24	28	5810	tanahashi	dummy	0	2012/12/12/13:34:57(130.34.95.49)	tanaka, onosensei permission
-14	33	38	5810	tanahashi	dummy	0	2012/12/12/13:40:13(130.34.95.49)	0	2012/12/13/17:0:5(130.34.95.49)
-18	20	25	6965	ota	dummy	0	2012/12/12/13:45:24(130.34.95.31)	0	2012/12/12/14:51:52(130.34.95.31)
-14	40	42	5810	kim	dummy	0	2012/12/12/14:1:8(130.34.95.49)	0	2012/12/14/13:17:37(130.34.95.49)
14	30	33	5810	Yokoyama	dummy	0	2012/12/12/14:11:42(130.34.95.49)	0
-13	6	10	6937	Nishino	dummy	0	2012/12/12/14:33:35(130.34.95.43)	田中先生承認	2012/12/12/14:33:54(130.34.95.43)
13	5	10	6937	Nishino	dummy	0	2012/12/12/14:34:6(130.34.95.43)	田中先生承認
-17	20	25	6965	ota	dummy	0	2012/12/12/14:51:49(130.34.95.31)	0	2012/12/12/16:7:5(130.34.95.43)
18	18	26	5810	Ka	dummy	0	2012/12/12/15:54:37(130.34.95.49)	0
20	21	30	5810	Xue	dummy	0	2012/12/12/15:57:48(130.34.95.49)	0
17	26	32	6965	ota	dummy	0	2012/12/12/16:7:1(130.34.95.43)	0
-13	38	48	5810	J	dummy	0	2012/12/12/23:57:55(130.34.95.44)	0	2012/12/12/23:58:1(130.34.95.44)
13	38	48	5810	HE Liang	dummy	0	2012/12/12/23:58:46(130.34.95.44)	2 wafers. 川合先生確認
-15	10	16	6937	Nishino	dummy	0	2012/12/13/4:5:52(130.34.95.44)	0	2012/12/13/4:13:46(130.34.95.44)
-15	16	18	6937	Nishino	dummy	0	2012/12/13/4:13:35(130.34.95.44)	0	2012/12/13/4:13:51(130.34.95.44)
-15	10	18	6937	Nishino	dummy	0	2012/12/13/4:14:16(130.34.95.44)	吉田先生承認	2012/12/13/4:54:23(130.34.95.43)
-15	10	20	6937	Nishino	dummy	0	2012/12/13/4:55:35(130.34.95.43)	吉田先生承認,	2012/12/13/4:55:41(130.34.95.43)
-15	10	18	6937	Nishino	dummy	0	2012/12/13/4:56:46(130.34.95.43)	吉田先生承認	2012/12/15/7:6:21(130.34.95.44)
-14	38	40	5810	tanahashi	dummy	0	2012/12/13/9:38:44(130.34.95.49)	0	2012/12/13/17:0:28(130.34.95.49)
14	33	36	5810	Yokoyama	dummy	0	2012/12/13/17:6:49(130.34.95.49)	0
14	26	30	5810	tanaka	dummy	0	2012/12/13/17:13:31(130.34.95.49)	0
-15	18	23	6937	hayasaka	dummy	0	2012/12/13/17:45:4(130.34.95.43)	0	2012/12/13/17:55:38(130.34.95.43)
-15	18	23	6937	hayasaka	dummy	0	2012/12/13/17:55:59(130.34.95.43)	吉田先生承認	2012/12/14/7:59:39(130.34.95.43)
14	36	40	6965	ohara	dummy	0	2012/12/13/18:28:53(130.34.95.31)	0
-14	17	20	5810	HE Liang	dummy	0	2012/12/13/22:5:9(130.34.95.44)	0	2012/12/14/2:3:42(130.34.95.49)
15	18	20	6937	hayasaka	dummy	0	2012/12/14/8:2:5(130.34.95.43)	吉田先生承認
-19	18	26	6937	K.Hikichi	dummy	0	2012/12/14/8:34:56(130.34.95.43)	0	2012/12/17/15:57:5(130.34.95.43)
15	20	24	6937	Hajika	dummy	0	2012/12/14/8:40:51(130.34.95.43)	吉田先生承認
18	8	15	6937	Hajika	dummy	0	2012/12/14/9:0:44(130.34.95.43)	吉田先生承認
-18	26	32	4119	nagai	dummy	0	2012/12/14/9:21:32(130.34.74.84)	0	2012/12/18/14:25:40(130.34.95.44)
-17	18	24	4771	he	dummy	0	2012/12/14/11:34:16(130.34.95.21)	0	2012/12/14/11:53:24(130.34.95.21)
14	25	26	6937	Froemel	dummy	0	2012/12/14/11:38:46(130.34.95.44)	0
17	20	24	4771	he	dummy	0	2012/12/14/11:53:39(130.34.95.21)	0
18	32	38	6937	Froemel	dummy	0	2012/12/14/12:2:27(130.34.95.44)	0
18	38	44	6937	Frömel	dummy	0	2012/12/14/13:48:50(130.34.95.43)	500µm
19	28	36	5810	kim	dummy	0	2012/12/14/14:12:6(130.34.95.49)	0
14	40	43	5810	HE Liang	dummy	0	2012/12/14/17:13:17(130.34.95.49)	0
-19	36	40	5810	Yokoyama	dummy	0	2012/12/14/18:14:27(130.34.95.49)	0	2012/12/17/17:37:3(130.34.95.49)
15	31	37	4771	yoshida	dummy	0	2012/12/14/18:19:10(130.34.95.21)	原先生承認
-15	37	40	5810	tanaka	dummy	0	2012/12/14/18:53:50(130.34.95.49)	inomata, permitted by kawai	2012/12/15/13:32:33(130.34.95.44)
15	28	31	5810	tanaka	dummy	0	2012/12/14/21:3:38(130.34.95.49)	inomata, permitted by kawai
20	30	40	4771	suzuki	dummy	0	2012/12/14/21:6:15(130.34.95.21)	2 wafers
15	10	17	6937	Nishino	dummy	0	2012/12/13/4:56:46(130.34.95.43)	吉田先生承認
-16	24	28	5810	tanahashi	dummy	0	2012/12/15/10:26:43(130.34.95.49)	tanaka, onosensei permission	2012/12/15/12:31:1(130.34.95.44)
16	20	26	5810	tanahashi	dummy	0	2012/12/15/12:31:38(130.34.95.44)	Tanaka, Ono
-17	46	48	5810	tanahashi	dummy	0	2012/12/15/12:33:48(130.34.95.44)	Tanaka, Ono	2012/12/17/10:40:13(130.34.95.49)
-18	0	6	5810	tanahashi	dummy	0	2012/12/15/12:34:12(130.34.95.44)	Tanaka, Ono	2012/12/17/10:40:23(130.34.95.49)
18	44	48	5810	tanahashi	dummy	0	2012/12/15/12:35:17(130.34.95.44)	Tanaka, Ono
19	0	2	5810	tanahashi	dummy	0	2012/12/15/12:35:39(130.34.95.44)	Tanaka, Ono
19	11	17	6937	hayasaka	dummy	0	2012/12/15/15:41:24(130.34.95.44)	吉田先生承認
17	15	20	4771	yoshida	dummy	0	2012/12/15/17:39:36(130.34.95.21)	0
16	47	48	5810	Toan, He	dummy	0	2012/12/16/21:32:25(130.34.95.43)	Ono sensei's permission
17	0	5	5810	Toan, He	dummy	0	2012/12/16/21:32:47(130.34.95.43)	0
17	5	8	5810	Toan	dummy	0	2012/12/17/1:0:45(130.34.95.43)	0
17	8	9	5810	Toan	dummy	0	2012/12/17/3:6:24(130.34.95.44)	0
-19	40	48	5810	tanahashi	dummy	0	2012/12/17/10:41:21(130.34.95.49)	0	2012/12/19/16:49:56(130.34.95.49)
-18	0	5	5810	HE Liang	dummy	0	2012/12/17/11:8:41(130.34.95.49)	0	2012/12/17/21:26:18(130.34.95.43)
20	40	46	5810	hayashi	dummy	0	2012/12/17/11:47:20(130.34.95.49)	0
-26	22	26	6965	ota	dummy	0	2012/12/17/15:22:34(130.34.95.43)	0	2012/12/21/15:49:7(130.34.95.43)
20	17	21	4771	he	dummy	0	2012/12/17/15:28:54(130.34.95.21)	0
19	21	28	5810	Yokoyama	dummy	0	2012/12/17/16:36:58(130.34.95.49)	0
17	46	48	5810	担当者	dummy	1	2012/12/17/19:57:48(130.34.95.44)	0
17	39	44	5810	Yokoyama	dummy	0	2012/12/11/11:46:26(130.34.95.49)	戸田先生承認
17	44	46	5810	担当者	dummy	1	2012/12/17/20:35:15(130.34.95.44)	0
18	0	5	5810	HE Liang	dummy	0	2012/12/17/21:27:14(130.34.95.43)	川合先生確認
18	15	16	6937	Hajika	dummy	0	2012/12/18/3:8:56(130.34.95.43)	延長
21	26	33	5810	M.Toda	dummy	0	2012/12/18/10:12:36(130.34.95.49)	0
-21	21	26	5810	wataya	dummy	0	2012/12/18/10:43:32(130.34.95.49)	0	2012/12/18/11:12:51(130.34.95.49)
21	22	24	5810	wataya	dummy	0	2012/12/18/11:13:6(130.34.95.49)	0
-20	46	48	5810	HE Liang	dummy	0	2012/12/18/12:38:25(130.34.95.49)	川合先生確認	2012/12/20/17:10:12(130.34.95.49)
-21	0	6	5810	HE Liang	dummy	0	2012/12/18/12:39:6(130.34.95.49)	川合先生確認	2012/12/20/19:12:22(130.34.95.49)
18	26	31	4119	nagai	dummy	0	2012/12/14/9:21:32(130.34.74.84)	0
-24	24	28	6937	Froemel	dummy	0	2012/12/18/18:39:11(130.34.95.44)	0	2012/12/18/18:43:3(130.34.95.44)
-24	24	32	6937	Froemel	dummy	0	2012/12/18/18:43:32(130.34.95.44)	0	2012/12/18/18:44:30(130.34.95.44)
-19	17	21	5810	Ka	dummy	0	2012/12/18/19:13:45(130.34.95.49)	0	2012/12/18/19:14:24(130.34.95.49)
-19	36	40	5810	zhao	dummy	0	2012/12/18/19:13:57(130.34.95.49)	0	2012/12/18/19:14:11(130.34.95.49)
-19	36	40	5810	Ka	dummy	0	2012/12/18/19:14:20(130.34.95.49)	0	2012/12/19/16:49:50(130.34.95.49)
19	17	21	5810	Ka	dummy	0	2012/12/18/19:14:35(130.34.95.49)	0
-24	29	36	6937	Frömel	dummy	0	2012/12/18/21:36:15(130.34.95.44)	0	2012/12/18/21:36:47(130.34.95.44)
24	29	34	6937	Frömel	dummy	0	2012/12/18/21:37:7(130.34.95.44)	0
-25	20	29	6937	Frömel	dummy	0	2012/12/18/21:37:44(130.34.95.44)	400µm	2012/12/25/8:43:31(130.34.95.43)
-20	11	17	6937	hayasaka	dummy	0	2012/12/19/6:56:13(130.34.95.43)	0	2012/12/19/6:57:38(130.34.95.43)
-20	11	17	6937	hayasaka	dummy	0	2012/12/19/6:58:10(130.34.95.43)	吉田先生承認	2012/12/19/19:34:57(130.34.95.43)
21	13	22	6937	F. Kurth	dummy	0	2012/12/19/10:10:31(130.34.95.43)	0
-20	0	9	5810	seo	dummy	0	2012/12/19/10:50:42(130.34.95.49)	戸田先生承認	2012/12/19/15:2:27(130.34.95.49)
21	6	13	6937	Nishino	dummy	0	2012/12/19/13:41:0(130.34.95.43)	0
20	0	9	5810	Seo,　Kim	dummy	0	2012/12/19/15:3:10(130.34.95.49)	戸田先生承認
19	36	42	5810	tanahashi	dummy	0	2012/12/19/16:50:10(130.34.95.49)	0
19	42	46	5810	kim	dummy	0	2012/12/19/17:3:54(130.34.95.44)	0
19	46	48	5810	seo, kim	dummy	0	2012/12/19/17:29:40(130.34.95.43)	戸田先生承認
24	34	40	6937	hayasaka	dummy	0	2012/12/19/19:34:42(130.34.95.43)	0
-20	11	15	5810	HE Liang	dummy	0	2012/12/19/19:54:55(130.34.95.49)	0	2012/12/19/20:16:21(130.34.95.49)
-28	26	32	6937	Hajika	dummy	0	2012/12/20/2:0:8(130.34.95.43)	0	2012/12/20/2:2:22(130.34.95.43)
-27	28	34	6937	Hajika	dummy	0	2012/12/20/2:2:44(130.34.95.43)	0	2012/12/26/11:55:9(130.34.95.43)
-28	4	16	6937	Hajika	dummy	0	2012/12/20/2:5:49(130.34.95.43)	2wafer 吉田先生承認	2012/12/28/0:2:31(130.34.95.49)
25	29	36	6937	Sabri	dummy	0	2012/12/20/16:53:38(130.34.129.200)	0
20	46	48	5810	Hayashi	dummy	0	2012/12/20/19:31:14(130.34.95.49)	0
21	24	26	6937	F. Kurth	dummy	0	2012/12/21/7:48:14(130.34.95.44)	0
-27	20	26	4119	satake	dummy	0	2012/12/21/10:4:51(130.34.95.44)	0	2012/12/21/10:26:38(130.34.95.44)
21	33	36	6937	F. Kurth	dummy	0	2012/12/21/10:21:23(130.34.95.44)	0
-27	19	25	4119	satake	dummy	0	2012/12/21/10:27:23(130.34.95.44)	0	2012/12/25/9:31:49(130.34.63.131)
22	31	35	5810	tanaka	dummy	0	2012/12/21/14:28:30(130.34.95.49)	inomata, permitted by kawai
21	36	41	6965	ota	dummy	0	2012/12/21/15:44:39(130.34.95.43)	0
21	41	43	6965	ota	dummy	0	2012/12/21/19:42:3(130.34.95.44)	0
21	43	45	6965	ota	dummy	0	2012/12/21/20:57:27(130.34.95.44)	0
-22	16	18	6937	Nishino	dummy	0	2012/12/21/22:0:35(130.34.95.43)	田中先生承認	2012/12/21/22:0:55(130.34.95.43)
22	14	17	6937	Nishino	dummy	0	2012/12/21/22:1:35(130.34.95.43)	田中先生承認
22	20	28	6965	ohara	dummy	0	2012/12/21/22:29:25(130.34.95.43)	佐々木先生承認
22	35	41	6965	endo,shen	dummy	0	2012/12/21/22:52:27(130.34.95.31)	佐々木先生承認
21	45	48	6965	ota	dummy	0	2012/12/21/23:28:2(130.34.95.44)	0
-27	25	28	6965	sakaki	dummy	0	2012/12/22/0:39:8(130.34.95.31)	0	2012/12/22/0:44:38(130.34.95.31)
-27	34	37	6965	sakaki	dummy	0	2012/12/22/0:41:35(130.34.95.31)	0	2012/12/22/0:43:1(130.34.95.31)
-27	36	39	6965	sakaki	dummy	0	2012/12/22/0:43:23(130.34.95.31)	0	2012/12/22/0:44:42(130.34.95.31)
27	25	28	6965	sakaki	dummy	0	2012/12/22/0:46:7(130.34.95.31)	0
-27	36	39	6965	sakaki	dummy	0	2012/12/22/0:48:18(130.34.95.31)	0	2012/12/22/0:56:12(130.34.95.31)
-27	35	39	6965	sakaki	dummy	0	2012/12/22/0:56:29(130.34.95.31)	0	2012/12/26/20:1:39(130.34.95.44)
22	28	30	6965	ohara	dummy	0	2012/12/22/12:29:26(130.34.95.44)	延長
-27	39	44	6965	ohara	dummy	0	2012/12/22/12:30:44(130.34.95.44)	0	2012/12/26/12:9:6(130.34.95.31)
-24	24	29	6937	Nishino	dummy	0	2012/12/24/9:29:42(130.34.95.43)	0	2012/12/24/9:36:36(130.34.95.43)
-25	9	16	6937	Nishino	dummy	0	2012/12/24/9:59:28(130.34.95.43)	0	2012/12/25/3:35:27(130.34.95.43)
24	40	41	6937	hayasaka	dummy	0	2012/12/24/18:55:39(130.34.95.44)	0
-25	38	48	4771	Minh	dummy	0	2012/12/24/19:2:51(130.34.95.44)	Prof. Kuwano's permission	2012/12/25/7:7:35(130.34.95.21)
25	6	7	4771	Minh	dummy	0	2012/12/25/2:40:30(130.34.95.21)	Prof. Kuwano's permission
25	7	8	4771	Minh	dummy	0	2012/12/25/3:23:19(130.34.95.44)	Prof. Kuwano's permission
25	9	10	6937	Nishino	dummy	0	2012/12/24/9:59:28(130.34.95.43)	0
25	10	16	6937	Nishino	dummy	0	2012/12/25/3:35:46(130.34.95.43)	0
25	16	17	6937	Nishino	dummy	0	2012/12/25/5:32:25(130.34.95.44)	0
-26	44	48	5810	HE Liang	dummy	0	2012/12/25/12:15:52(130.34.95.49)	川合先生確認	2012/12/26/10:21:15(130.34.95.49)
-27	10	15	5810	HE Liang	dummy	0	2012/12/26/10:22:23(130.34.95.49)	川合先生確認	2012/12/27/1:41:15(130.34.95.43)
27	28	33	6965	ohara	dummy	0	2012/12/26/12:8:10(130.34.95.31)	0
28	28	33	6937	Sabri	dummy	0	2012/12/26/19:15:24(130.34.95.43)	0
26	26	41	6937	Kochhar	dummy	0	2012/12/3/21:20:4(130.34.95.43)	2 wafers
27	20	23	6965	sakaki	dummy	0	2012/12/26/20:1:59(130.34.95.44)	0
27	33	39	4771	yoshida	dummy	0	2012/12/26/20:3:48(130.34.95.21)	0
26	43	48	5810	Ka	dummy	0	2012/12/26/20:52:38(130.34.95.49)	Toda sensei's permission
27	14	18	5810	HE Liang	dummy	0	2012/12/27/1:43:3(130.34.95.43)	川合先生確認
27	23	24	6965	sakaki	dummy	0	2012/12/27/10:21:1(130.34.95.44)	0
28	33	39	5810	hayashi	dummy	0	2012/12/27/14:24:13(130.34.95.43)	0
28	19	28	5244	takahashi	dummy	0	2012/12/27/16:28:47(130.34.95.43)	500micron
27	45	47	5810	Toan	dummy	0	2012/12/27/21:19:21(130.34.95.43)	0
29	30	36	5244	takahashi	dummy	0	2012/12/28/13:25:46(130.34.95.44)	岡島先生承認、　小野研棚橋君
-29	36	42	6909	kanno&harashima	dummy	0	2012/12/28/13:59:58(130.34.95.37)	田中徹教授承認	2012/12/29/12:23:11(130.34.95.37)
29	36	38	5244	takahashi	dummy	0	2012/12/29/16:19:27(130.34.95.44)	延長
29	44	48	6965	Hayakawa	dummy	0	2012/12/29/21:34:44(130.34.95.43)	0
30	0	2	6965	Hayakawa	dummy	0	2012/12/29/22:5:48(130.34.95.44)	0
31	33	37	6937	F. Kurth	dummy	0	2012/12/31/15:49:3(130.34.95.43)	0