2 28 36 4771 Phan dummy 0 2012/1/2/13:18:21(130.34.95.43) with Minh, Kuwano sensei`s permission 3 38 41 5810 inomata dummy 0 2012/1/3/14:12:2(130.34.95.43) tanaka, 川合先生承認 4 30 33 5810 inomata dummy 0 2012/1/4/11:57:32(130.34.95.49) 0 4 33 41 5810 tanaka dummy 0 2012/1/4/14:55:9(130.34.95.49) 0 5 26 36 5318 yanagisawa,araki dummy 0 2012/1/4/15:37:52(130.34.231.209) 0 5 40 43 5810 inomata dummy 0 2012/1/5/13:54:15(130.34.95.43) 0 5 36 40 5318 yanagisawa dummy 0 2012/1/5/13:54:46(130.34.95.43) 0 -6 34 44 6909 kino dummy 0 2012/1/5/17:13:48(130.34.95.37) 0 2012/1/6/1:44:38(130.34.95.37) -9 26 32 6936 Hirano dummy 0 2012/1/5/18:41:38(130.34.95.43) 0 2012/1/5/18:43:25(130.34.95.43) 10 26 32 6936 Hirano dummy 0 2012/1/5/18:43:40(130.34.95.43) 0 -6 18 25 6908 Ohara Yuki dummy 0 2012/1/5/19:48:16(130.34.95.44) 0 2012/1/5/22:56:0(130.34.95.44) 5 43 48 6908 Y. Ohara, H. Kino dummy 0 2012/1/5/21:11:7(130.34.95.44) 田中先生 承認済 6 0 2 6908 Y. Ohara, H. Kino dummy 0 2012/1/5/22:56:20(130.34.95.44) 田中先生 承認済 -6 40 44 6909 kino dummy 0 2012/1/6/1:44:59(130.34.95.37) 0 2012/1/6/20:7:17(130.34.95.44) 6 31 37 4119 S.Watanabe dummy 0 2012/1/6/7:57:28(130.34.63.131) 0 10 32 38 6937 fukushi dummy 0 2012/1/6/12:46:46(130.34.95.43) 0 10 18 26 5318 yanagisawa dummy 0 2012/1/6/14:12:14(130.34.231.209) 0 -11 20 26 6965 ota dummy 0 2012/1/6/18:45:38(130.34.95.31) 0 2012/1/6/18:46:30(130.34.95.31) 11 21 27 6965 ota dummy 0 2012/1/6/18:46:41(130.34.95.31) 0 6 40 43 6909 kino dummy 0 2012/1/6/1:44:59(130.34.95.37) 0 8 40 44 6909 kino,watanabe dummy 0 2012/1/8/19:21:46(130.34.95.44) 田中先生承認済み 10 38 42 5318 yanagisawa dummy 0 2012/1/10/11:36:59(130.34.95.44) 0 -13 44 48 5810 Araki dummy 0 2012/1/10/12:26:16(130.34.95.49) プラズマ計測実験、小野研川合立ち会い 2012/1/13/20:12:7(130.34.231.209) -14 0 44 5318 Araki dummy 0 2012/1/10/12:26:54(130.34.95.49) プラズマ計測実験、小野研川合立ち会い 2012/1/14/18:33:41(130.34.95.44) 10 42 44 5318 yanagisawa dummy 0 2012/1/10/13:29:11(130.34.231.209) 0 -11 27 33 5810 tanaka dummy 0 2012/1/10/14:45:5(130.34.95.49) 0 2012/1/10/14:45:22(130.34.95.49) 11 30 38 5810 Kim dummy 0 2012/1/10/22:1:35(130.34.95.49) 0 11 38 45 5810 Toan dummy 0 2012/1/10/22:17:2(130.34.95.49) 0 -12 20 24 6937 fukushi dummy 0 2012/1/11/16:13:45(130.34.95.44) 0 2012/1/11/17:14:19(130.34.95.44) 11 46 48 6909 kino,noriki dummy 1 2012/1/11/17:10:58(130.34.95.44) LP-CVD電源取り外しのため一時的に立ち下げ 12 26 30 6937 fukushi dummy 0 2012/1/11/17:14:35(130.34.95.44) 0 -13 28 34 6965 ota dummy 0 2012/1/11/17:21:28(130.34.95.31) 0 2012/1/13/10:27:21(130.34.95.43) -17 20 26 6936 Hirano dummy 0 2012/1/11/17:53:57(130.34.95.43) 0 2012/1/12/12:8:27(130.34.95.43) -12 20 24 4830 furuya dummy 0 2012/1/11/18:13:46(130.34.95.30) 0 2012/1/11/18:14:32(130.34.95.30) 12 18 22 4830 furuya dummy 0 2012/1/11/18:14:51(130.34.95.30) 0 12 30 36 5318 araki dummy 0 2012/1/11/20:0:7(130.34.231.209) 0 -12 39 42 5318 araki dummy 0 2012/1/11/20:4:1(130.34.231.209) 0 2012/1/11/20:11:37(130.34.231.209) 12 40 43 5318 araki dummy 0 2012/1/11/20:13:28(130.34.231.209) 0 12 22 26 5810 Kim dummy 0 2012/1/11/20:55:46(130.34.95.49) 0 11 45 46 5810 Toan dummy 0 2012/1/11/21:17:33(130.34.95.44) 0 16 30 36 6936 Hirano dummy 0 2012/1/12/12:8:21(130.34.95.43) 0 12 37 40 6908 Ohara Yuki dummy 0 2012/1/12/15:22:27(130.34.95.37) 0 -13 21 28 6937 fukushi dummy 0 2012/1/12/15:25:20(130.34.95.44) 0 2012/1/13/10:21:26(130.34.95.44) 13 36 39 6965 kotani dummy 0 2012/1/12/18:33:49(130.34.95.31) 0 13 39 44 6965 chu dummy 0 2012/1/12/20:3:35(130.34.95.43) 0 13 21 23 6937 fukushi dummy 0 2012/1/12/15:25:20(130.34.95.44) 0 -13 24 30 6965 ota dummy 0 2012/1/13/10:27:38(130.34.95.43) 0 2012/1/13/10:49:0(130.34.95.31) 13 28 34 6965 ota dummy 0 2012/1/13/10:49:9(130.34.95.31) 0 16 26 30 6937 Hajika dummy 0 2012/1/13/14:45:51(130.34.95.43) 0 13 34 36 6965 chu dummy 0 2012/1/13/14:50:49(130.34.95.31) 0 16 20 26 6937 fukushi dummy 0 2012/1/13/15:28:22(130.34.95.44) 0 16 38 44 5810 Kim dummy 0 2012/1/13/17:4:4(130.34.95.43) 0 16 44 48 6965 chu dummy 0 2012/1/13/17:23:3(130.34.95.31) 0 -17 30 38 6965 chu dummy 0 2012/1/13/17:23:27(130.34.95.31) 0 2012/1/14/2:2:33(130.34.95.31) -17 18 24 5810 HE Liang dummy 0 2012/1/13/18:53:53(130.34.95.49) 0 2012/1/16/21:29:39(130.34.95.49) 17 28 37 6965 chu dummy 0 2012/1/14/2:2:50(130.34.95.31) 0 14 0 40 5318 Araki dummy 0 2012/1/10/12:26:54(130.34.95.49) プラズマ計測実験、小野研川合立ち会い -17 37 48 5810 SEO dummy 0 2012/1/14/20:31:47(130.34.95.49) 0 2012/1/14/20:32:3(130.34.95.49) -18 18 30 5810 SEO dummy 0 2012/1/15/14:35:53(130.34.95.49) 0 2012/1/16/21:34:13(130.34.95.49) -17 38 43 5318 araki dummy 0 2012/1/15/22:1:36(130.34.231.209) 0 2012/1/15/22:2:34(130.34.231.209) 17 24 28 5318 araki dummy 0 2012/1/15/22:2:47(130.34.231.209) 0 16 36 38 5810 Toan dummy 0 2012/1/16/11:3:36(130.34.95.43) 0 18 30 37 6937 Hajika dummy 0 2012/1/16/14:52:18(130.34.95.43) 0 -19 26 29 5810 tanaka dummy 0 2012/1/16/16:8:53(130.34.95.49) 0 2012/1/18/16:19:47(130.34.95.43) -17 37 43 6965 kotani dummy 0 2012/1/16/16:9:47(130.34.95.31) 0 2012/1/16/16:10:44(130.34.95.31) 17 37 44 6965 kotani dummy 0 2012/1/16/16:10:54(130.34.95.31) 0 17 14 24 5810 SEO dummy 0 2012/1/16/21:34:9(130.34.95.49) 0 -18 18 22 5810 SEO dummy 0 2012/1/16/21:34:33(130.34.95.49) 0 2012/1/17/9:32:48(130.34.95.44) 17 44 48 6965 chu, Kotani dummy 0 2012/1/17/4:20:24(130.34.95.43) 0 -18 26 30 5810 Kim dummy 0 2012/1/17/9:59:52(130.34.95.49) 0 2012/1/17/14:6:41(130.34.95.49) 18 21 25 5810 Kim dummy 0 2012/1/17/14:7:8(130.34.95.49) 0 18 25 28 6937 T. Matsumura dummy 0 2012/1/17/15:20:26(130.34.95.43) 0 19 20 26 4119 S.Watanabe dummy 0 2012/1/17/15:39:3(130.34.95.44) 0 19 38 44 6937 Tsai dummy 0 2012/1/17/17:1:0(130.34.95.44) 0 19 32 38 6937 N.WANG dummy 0 2012/1/17/17:5:35(130.34.95.43) 0 -18 0 3 6965 chu, kotani dummy 0 2012/1/17/17:43:46(130.34.95.44) 0 2012/1/17/23:34:14(130.34.95.44) 20 22 27 6965 ota dummy 0 2012/1/17/19:7:35(130.34.95.31) 0 -18 37 43 5810 Toan dummy 0 2012/1/17/22:34:43(130.34.95.43) 0 2012/1/17/23:1:32(130.34.95.49) 18 3 16 6908 Y. Ohara, A. Noriki dummy 0 2012/1/17/22:54:30(130.34.95.44) 田中先生 承認済 -18 40 48 6908 Y. Ohara, A. Noriki dummy 0 2012/1/17/23:7:43(130.34.95.44) 田中先生 承認済 2012/1/18/15:16:10(130.34.95.37) 18 0 2 6965 chu, kotani dummy 0 2012/1/17/23:34:40(130.34.95.44) 0 24 26 32 6936 Hirano dummy 0 2012/1/18/9:9:54(130.34.95.43) 0 18 28 30 5810 inomata dummy 0 2012/1/18/10:26:36(130.34.95.49) 0 -19 29 32 5810 tanaka dummy 0 2012/1/18/16:20:21(130.34.95.43) 0 2012/1/19/12:36:53(130.34.95.44) 20 17 22 6936 T. Naono dummy 0 2012/1/18/19:26:57(130.34.95.43) 0 20 27 33 4771 Phan dummy 0 2012/1/19/0:4:23(130.34.95.21) 0 -20 33 40 5810 HE Liang dummy 0 2012/1/19/9:25:56(130.34.95.49) 0 2012/1/19/10:39:34(130.34.95.49) -20 40 46 5810 HE Liang dummy 0 2012/1/19/10:39:52(130.34.95.49) 0 2012/1/20/9:34:21(130.34.95.49) -19 26 29 5810 tanaka dummy 1 2012/1/19/11:59:30(130.34.95.49) 0 2012/1/19/11:59:45(130.34.95.49) 19 26 29 5810 tanaka dummy 1 2012/1/19/12:0:2(130.34.95.49) 0 -19 29 32 5810 tanaka dummy 1 2012/1/19/12:37:10(130.34.95.44) 0 2012/1/19/13:15:45(130.34.95.44) -24 20 26 6965 kotani dummy 0 2012/1/19/13:43:45(130.34.95.31) 0 2012/1/23/17:8:50(130.34.95.31) -23 22 25 6965 kotani dummy 0 2012/1/19/13:44:58(130.34.95.31) 0 2012/1/23/9:33:0(130.34.95.31) 19 44 48 6908 Y. Ohara, A. Noriki dummy 0 2012/1/19/14:56:12(130.34.95.44) 田中先生 承認済 -23 26 34 6936 Rakesh Chand dummy 0 2012/1/19/16:43:43(130.34.95.43) 0 2012/1/23/11:50:22(130.34.95.43) 20 33 40 6937 Tsai dummy 0 2012/1/19/18:22:34(130.34.95.44) 0 -23 34 42 5318 araki dummy 0 2012/1/19/21:42:22(130.34.231.209) 0 2012/1/20/14:13:40(130.34.231.209) 20 12 17 5810 Toan dummy 0 2012/1/19/22:30:26(130.34.95.49) 0 -24 32 36 6937 Hajika dummy 0 2012/1/20/10:55:58(130.34.95.43) 0 2012/1/21/2:52:51(130.34.95.43) -26 30 37 6937 Hajika dummy 0 2012/1/20/10:57:33(130.34.95.43) 0 2012/1/20/10:57:57(130.34.95.43) -26 30 37 6937 Hajika dummy 0 2012/1/20/11:24:24(130.34.95.43) 0 2012/1/21/2:53:8(130.34.95.43) -24 36 42 5318 yanagisawa dummy 0 2012/1/20/11:48:28(130.34.95.43) 0 2012/1/23/9:17:35(130.34.231.209) 23 34 39 5318 araki dummy 0 2012/1/20/14:13:57(130.34.231.209) 0 -23 39 45 5810 ka dummy 0 2012/1/20/14:40:30(130.34.95.49) 0 2012/1/20/15:0:32(130.34.95.49) -23 39 43 5810 ka dummy 0 2012/1/20/15:0:46(130.34.95.49) 0 2012/1/23/19:0:59(130.34.95.49) -25 16 28 6936 T. Naono dummy 0 2012/1/20/16:34:34(130.34.95.43) 0 2012/1/23/17:1:3(130.34.95.43) 23 16 22 6936 T. Naono dummy 0 2012/1/20/16:35:42(130.34.95.43) 0 20 42 45 5810 Toan dummy 0 2012/1/20/16:59:16(130.34.95.49) 0 20 40 42 6937 Tsai dummy 0 2012/1/20/18:7:2(130.34.95.44) 0 -25 28 32 6937 Hajika dummy 0 2012/1/21/2:57:48(130.34.95.43) 0 2012/1/23/13:18:1(130.34.95.43) -27 28 35 6937 Hajika dummy 0 2012/1/21/3:0:3(130.34.95.43) 0 2012/1/23/13:18:10(130.34.95.43) -22 26 28 5810 inomata dummy 0 2012/1/22/11:41:39(130.34.95.49) tanaka, 2012/1/22/11:41:45(130.34.95.49) 22 26 28 5810 inomata dummy 0 2012/1/22/11:42:2(130.34.95.49) tanaka,川合先生承認 22 40 42 5810 inomata dummy 0 2012/1/22/18:32:17(130.34.95.49) tanaka,川合先生承認済み 23 10 16 6965 endo dummy 0 2012/1/23/4:11:42(130.34.95.31) 金森先生承認 23 43 47 5810 HE Liang dummy 0 2012/1/23/9:53:14(130.34.95.49) 0 23 22 26 6936 T.Naono dummy 0 2012/1/23/10:17:20(130.34.95.44) 0 -24 32 40 6936 T.Naono dummy 0 2012/1/23/17:0:41(130.34.95.43) 0 2012/1/23/17:1:11(130.34.95.43) 24 32 42 6936 T.Naono dummy 0 2012/1/23/17:1:28(130.34.95.43) 0 23 39 40 5810 ka dummy 0 2012/1/20/15:0:46(130.34.95.49) 0 25 26 34 5810 Yokoyama dummy 1 2012/1/23/22:11:43(130.34.95.49) 0 25 40 46 6936 Hirano dummy 0 2012/1/24/11:5:57(130.34.95.43) 0 25 36 40 5810 ka dummy 0 2012/1/24/15:29:14(130.34.95.49) 0 25 18 20 6936 T. Naono dummy 0 2012/1/24/19:49:12(130.34.95.43) 0 25 46 48 4771 Phan dummy 0 2012/1/24/21:55:11(130.34.95.21) with Minh, Kuwano sensei`s permission 26 0 2 4771 Phan dummy 0 2012/1/24/21:55:53(130.34.95.21) 0 26 40 44 5318 araki dummy 0 2012/1/24/23:50:13(130.34.231.209) 0 26 18 28 5810 SEO dummy 0 2012/1/25/10:48:15(130.34.95.49) 0 25 34 36 5810 Yokoyama dummy 1 2012/1/25/16:6:53(130.34.95.49) 0 26 28 31 5810 Ka dummy 0 2012/1/25/20:10:32(130.34.95.49) 0 -27 18 27 6936 T. Naono dummy 0 2012/1/26/11:8:35(130.34.95.43) 0 2012/1/26/11:10:32(130.34.95.43) -27 24 33 6936 T. Naono dummy 0 2012/1/26/11:11:25(130.34.95.43) 0 2012/1/26/11:11:56(130.34.95.43) -28 24 33 6936 T. Naono dummy 0 2012/1/26/11:12:4(130.34.95.43) 0 2012/1/26/11:12:8(130.34.95.43) 27 24 34 6936 T. Naono dummy 0 2012/1/26/11:12:15(130.34.95.43) 0 26 31 33 5810 ka dummy 0 2012/1/26/13:34:43(130.34.95.49) 0 26 44 48 5318 araki dummy 0 2012/1/26/16:53:8(130.34.231.209) 0 -26 35 38 6937 fukushi dummy 0 2012/1/26/16:55:31(130.34.95.43) 0 2012/1/26/17:22:24(130.34.95.44) 26 35 37 6937 fukushi dummy 0 2012/1/26/16:55:31(130.34.95.43) 0 -27 34 42 5810 tanaka dummy 0 2012/1/26/20:42:45(130.34.95.49) 0 2012/1/27/17:40:1(130.34.95.44) 27 0 22 5810 kawai dummy 1 2012/1/27/1:55:17(130.34.95.49) チャンバメカクリ後真空引き 27 34 38 5810 tanaka dummy 0 2012/1/26/20:42:45(130.34.95.49) 0 27 38 40 5810 tanaka dummy 0 2012/1/27/17:40:26(130.34.95.44) 0 28 36 41 4771 Phan dummy 0 2012/1/28/16:15:12(130.34.95.43) with Minh, Kuwano sensei`permission -30 38 44 4771 Phan dummy 0 2012/1/28/17:8:31(130.34.95.44) 0 2012/1/28/22:0:22(130.34.95.21) 28 41 44 4771 Phan dummy 0 2012/1/28/18:33:52(130.34.95.43) 0 -30 38 42 5810 Ka dummy 0 2012/1/30/14:25:56(130.34.95.49) 0 2012/1/30/15:49:58(130.34.95.49) 30 40 44 5810 Ka dummy 0 2012/1/30/15:50:19(130.34.95.49) 0