1	28	36	6936	Samoto	dummy	0	2012/10/1/9:24:1(130.34.95.43)	Ar etching
1	21	24	5810	mitsui	dummy	0	2012/10/1/10:18:4(130.34.95.49)	0
4	22	28	5810	mitsui	dummy	0	2012/10/4/11:47:1(130.34.95.44)	CH4plasma
4	41	46	6936	Samoto	dummy	0	2012/10/4/18:14:47(130.34.95.43)	Ar etching
16	26	36	5810	M.Toda	dummy	1	2012/10/12/13:26:16(130.34.95.49)	Etchingチャンバでクリーニング
14	33	40	6936	Samoro	dummy	0	2012/10/14/15:46:19(130.34.95.43)	Ar
15	30	36	6936	Samoto	dummy	0	2012/10/15/10:24:0(130.34.95.43)	Ar
25	26	34	6925	Fukushige	dummy	0	2012/10/25/10:26:42(130.34.95.35)	0
25	42	48	6925	Fukushige	dummy	0	2012/10/25/20:56:7(130.34.95.35)	0