1	20	32	6937	Kochhar	dummy	0	2012/2/29/9:55:7(130.34.95.43)	0
-2	17	20	4119	konno	dummy	0	2012/2/29/15:16:55(130.34.95.44)	0	2012/3/2/7:19:37(130.34.95.44)
-1	32	36	4119	suzuki	dummy	0	2012/2/29/17:39:22(130.34.95.44)	0	2012/2/29/17:40:3(130.34.95.44)
1	32	37	4119	suzuki	dummy	0	2012/2/29/17:40:20(130.34.95.44)	0
1	37	41	6937	Kochhar	dummy	0	2012/3/1/14:22:32(130.34.95.44)	0
-2	20	22	4119	S.Watanabe	dummy	0	2012/3/1/14:54:59(130.34.95.44)	0	2012/3/1/16:50:31(130.34.95.44)
2	20	31	6937	Kochhar	dummy	0	2012/3/1/19:31:58(130.34.95.44)	0
2	31	35	6937	Kochhar	dummy	0	2012/3/2/8:50:53(130.34.95.43)	0
4	18	24	4119	yukaito	dummy	0	2012/3/2/12:22:37(130.34.95.44)	0
2	37	43	4771	Phan	dummy	0	2012/3/2/17:39:49(130.34.95.44)	0
-5	26	38	6909	S.Kanno	dummy	0	2012/3/3/17:36:12(130.34.95.44)	0	2012/3/5/14:8:30(130.34.95.44)
7	20	26	6937	Moriwaki	dummy	0	2012/3/5/7:42:24(130.34.95.43)	0
-8	20	26	6937	Moriwaki	dummy	0	2012/3/5/7:47:58(130.34.95.43)	0	2012/3/7/18:49:14(130.34.95.43)
5	18	21	4119	yukaito	dummy	0	2012/3/5/10:24:32(130.34.74.84)	0
5	26	31	6909	S.Kanno	dummy	0	2012/3/3/17:36:12(130.34.95.44)	0
-5	33	42	6909	S.Kanno	dummy	0	2012/3/5/14:8:48(130.34.95.44)	0	2012/3/5/15:17:28(130.34.95.44)
5	38	46	6909	S.Kanno	dummy	0	2012/3/5/18:26:14(130.34.95.44)	0
-6	22	30	6909	S.Kanno	dummy	0	2012/3/5/23:30:2(130.34.95.44)	0	2012/3/6/13:1:49(130.34.95.37)
6	34	40	4119	nagai	dummy	0	2012/3/6/9:29:34(130.34.74.84)	0
6	22	29	6909	S.Kanno	dummy	0	2012/3/5/23:30:2(130.34.95.44)	0
6	31	34	4119	S.Watanabe	dummy	0	2012/3/6/13:5:14(130.34.95.37)	0
6	40	46	6909	S.Kanno	dummy	0	2012/3/6/14:7:36(130.34.95.37)	0
7	18	20	4119	S.Watanabe	dummy	0	2012/3/6/16:26:12(130.34.95.44)	0
-7	26	32	4119	yukaito	dummy	0	2012/3/6/16:50:40(130.34.95.44)	0	2012/3/6/16:50:48(130.34.95.44)
-7	26	34	4119	yukaito	dummy	0	2012/3/6/16:51:6(130.34.95.44)	0	2012/3/7/13:23:36(130.34.95.44)
7	34	39	4771	Phan	dummy	0	2012/3/6/23:18:47(130.34.95.44)	0
12	18	40	6936	T. Naono	dummy	1	2012/3/7/8:39:46(130.34.95.43)	chamber cleaning
7	26	29	4119	yukaito	dummy	0	2012/3/6/16:51:6(130.34.95.44)	0
7	29	34	4771	Phan	dummy	0	2012/3/7/13:50:30(130.34.95.21)	0
8	18	20	4119	S.Watanabe	dummy	0	2012/3/7/14:40:0(130.34.95.44)	0
-8	30	38	6909	S.Kanno	dummy	0	2012/3/7/15:43:41(130.34.95.37)	0	2012/3/8/1:32:26(130.34.95.37)
-8	26	30	4119	yukaito	dummy	0	2012/3/7/17:52:12(130.34.95.44)	0	2012/3/8/10:0:6(130.34.74.84)
7	39	44	4771	Phan	dummy	0	2012/3/7/17:54:37(130.34.95.44)	0
8	38	46	4771	Phan	dummy	0	2012/3/7/20:2:4(130.34.95.44)	0
7	44	48	4771	Phan	dummy	0	2012/3/7/20:4:5(130.34.95.44)	with Minh, Kuwano sensei's permission
8	0	8	4771	Phan	dummy	0	2012/3/7/20:46:24(130.34.95.44)	with Minh, Kuwano sensei's permission
8	20	26	6937	Moriwaki	dummy	0	2012/3/7/22:28:11(130.34.95.43)	0
9	18	24	6937	Moriwaki	dummy	0	2012/3/7/22:29:56(130.34.95.43)	0
-9	34	42	6909	S.Kanno	dummy	0	2012/3/8/1:32:48(130.34.95.37)	0	2012/3/8/1:32:57(130.34.95.37)
-8	32	38	6909	S.Kanno	dummy	0	2012/3/8/1:33:28(130.34.95.37)	0	2012/3/8/14:3:28(130.34.95.37)
9	24	28	4119	yukaito	dummy	0	2012/3/8/8:2:9(130.34.74.84)	0
8	26	32	4119	S.Watanabe	dummy	0	2012/3/8/10:42:54(130.34.95.44)	0
8	34	38	4771	Phan	dummy	0	2012/3/8/14:8:36(130.34.95.44)	0
9	28	36	6909	S.Kanno	dummy	0	2012/3/8/17:19:41(130.34.95.37)	0
9	36	42	6937	Moriwaki	dummy	0	2012/3/9/11:27:24(130.34.95.43)	0
-13	18	24	4119	S.Watanabe	dummy	0	2012/3/9/13:6:58(130.34.95.44)	0	2012/3/9/15:46:20(130.34.95.44)
13	18	26	4119	S.Watanabe	dummy	0	2012/3/9/15:46:45(130.34.95.44)	0
10	27	35	6965	chu	dummy	0	2012/3/9/20:26:8(130.34.95.44)	0
10	35	38	6965	chu	dummy	0	2012/3/10/14:16:55(130.34.95.31)	0
10	38	44	6965	chu	dummy	0	2012/3/10/17:29:47(130.34.95.44)	0
13	27	31	4119	konno	dummy	0	2012/3/12/9:14:55(130.34.95.44)	0
15	18	22	4119	konno	dummy	0	2012/3/12/9:16:11(130.34.95.44)	0
-14	28	36	4119	nagai	dummy	0	2012/3/12/10:51:30(130.34.95.44)	0	2012/3/13/15:2:27(130.34.74.84)
-13	32	37	6937	Moriwaki	dummy	0	2012/3/12/16:24:23(130.34.95.43)	0	2012/3/13/11:2:16(130.34.95.43)
12	45	48	4771	Phan	dummy	0	2012/3/12/20:9:57(130.34.95.44)	with Minh, Kuwano sensei`s permission
13	2	6	4771	Phan	dummy	0	2012/3/12/22:55:15(130.34.95.44)	with Minh, Kuwano sensei's permission
-14	18	24	4119	S.Watanabe	dummy	0	2012/3/13/8:5:58(130.34.95.44)	0	2012/3/13/8:6:27(130.34.95.44)
14	18	27	4119	S.Watanabe	dummy	0	2012/3/13/8:6:38(130.34.95.44)	0
-14	27	28	4119	yukaito	dummy	0	2012/3/13/8:11:28(130.34.74.84)	0	2012/3/13/12:12:46(130.34.95.44)
15	22	28	4119	S.Watanabe	dummy	0	2012/3/13/10:11:6(130.34.63.131)	0
13	26	27	4119	yukaito	dummy	0	2012/3/13/12:12:59(130.34.95.44)	0
-20	36	42	6937	Asano	dummy	0	2012/3/13/13:8:41(130.34.95.43)	0	2012/3/13/13:10:12(130.34.95.43)
19	36	42	6937	Asano	dummy	0	2012/3/13/13:10:10(130.34.95.43)	0
-23	20	26	6937	Asano	dummy	0	2012/3/13/13:39:28(130.34.95.43)	0	2012/3/19/21:19:51(130.34.95.43)
25	22	32	6937	Asano, Moriwaki	dummy	0	2012/3/13/13:49:11(130.34.95.43)	田中先生許可。
13	31	33	4119	konno	dummy	0	2012/3/13/14:4:54(130.34.95.44)	0
-14	28	38	4119	nagai	dummy	0	2012/3/13/15:2:40(130.34.74.84)	0	2012/3/14/15:3:27(130.34.95.44)
-15	28	36	4119	nagai	dummy	0	2012/3/13/15:50:53(130.34.74.84)	0	2012/3/14/14:8:56(130.34.74.84)
-16	19	23	4119	konno	dummy	0	2012/3/14/8:16:26(130.34.63.131)	0	2012/3/15/12:55:13(130.34.63.131)
-16	31	35	4119	konno	dummy	0	2012/3/14/8:20:47(130.34.63.131)	0	2012/3/15/13:27:24(130.34.63.131)
-14	38	42	6937	Kochhar	dummy	0	2012/3/14/8:46:11(130.34.95.43)	0	2012/3/14/10:10:14(130.34.95.43)
-14	27	28	4119	yukaito	dummy	0	2012/3/14/8:46:19(130.34.95.44)	0	2012/3/14/11:18:38(130.34.95.44)
14	38	39	6937	Kochhar	dummy	0	2012/3/14/10:10:27(130.34.95.43)	0
-15	36	38	4119	yukaito	dummy	0	2012/3/14/11:18:57(130.34.95.44)	0	2012/3/14/14:10:3(130.34.74.84)
15	28	33	4119	nagai	dummy	0	2012/3/14/14:9:17(130.34.74.84)	0
-15	33	35	4119	yukaito	dummy	0	2012/3/14/14:10:17(130.34.74.84)	0	2012/3/15/15:22:43(130.34.95.37)
14	28	33	4119	nagai	dummy	0	2012/3/13/15:2:40(130.34.74.84)	0
15	36	42	6908	Ohara Yuki	dummy	0	2012/3/15/10:27:42(130.34.95.37)	0
-16	20	23	4119	konno	dummy	0	2012/3/15/12:55:29(130.34.63.131)	0	2012/3/15/13:26:39(130.34.63.131)
-16	17	20	4119	konno	dummy	0	2012/3/15/13:26:52(130.34.63.131)	0	2012/3/16/8:21:6(130.34.95.44)
16	28	32	4119	konno	dummy	0	2012/3/15/13:27:43(130.34.63.131)	0
-16	36	48	6965	chu	dummy	0	2012/3/15/22:39:56(130.34.95.44)	0	2012/3/16/1:24:43(130.34.95.44)
16	32	44	6965	chu	dummy	0	2012/3/16/1:25:6(130.34.95.44)	0
16	24	28	4119	S.Watanabe	dummy	0	2012/3/16/8:6:3(130.34.95.44)	0
-19	18	24	4119	S.Watanabe	dummy	0	2012/3/16/8:6:38(130.34.95.44)	0	2012/3/16/14:59:29(130.34.95.44)
16	17	19	4119	konno	dummy	0	2012/3/15/13:26:52(130.34.63.131)	0
-21	19	23	4119	konno	dummy	0	2012/3/16/8:21:45(130.34.95.44)	0	2012/3/19/15:55:39(130.34.95.44)
-19	16	18	4119	nagai	dummy	0	2012/3/16/14:49:33(130.34.63.131)	0	2012/3/19/7:4:26(130.34.95.44)
19	18	26	4119	S.Watanabe	dummy	0	2012/3/16/14:59:41(130.34.95.44)	0
19	26	32	6937	N.WANG	dummy	0	2012/3/16/17:47:59(130.34.95.43)	0
17	36	40	4771	Phan	dummy	0	2012/3/17/15:44:6(130.34.95.43)	with minh, Kuwano sensei`s permission
17	40	44	4771	Phan	dummy	0	2012/3/17/17:48:12(130.34.95.44)	with Minh, Kuwano sensei`s permission
18	16	24	4771	Phan	dummy	0	2012/3/18/6:30:39(130.34.95.43)	with Minh, Kuwano sensei`s permission
18	29	31	5810	Toan	dummy	0	2012/3/18/13:29:53(130.34.95.49)	With Xue, Miyashita sensei`s permission
19	16	17	4119	nagai	dummy	0	2012/3/16/14:49:33(130.34.63.131)	0
-19	42	48	6937	Moriwaki, Asano	dummy	0	2012/3/19/7:39:0(130.34.95.43)	田中先生許可。	2012/3/19/8:24:12(130.34.95.43)
-21	26	41	6937	Kochhar	dummy	0	2012/3/19/9:35:42(130.34.95.43)	0	2012/3/20/10:17:27(130.34.95.43)
19	32	34	6937	N.WANG	dummy	0	2012/3/19/12:35:28(130.34.95.44)	0
-21	21	25	4119	konno	dummy	0	2012/3/19/15:55:53(130.34.95.44)	0	2012/3/21/6:32:20(130.34.95.44)
-23	26	41	6937	Kochhar	dummy	0	2012/3/19/19:38:35(130.34.95.43)	0	2012/3/22/19:7:56(130.34.95.43)
-23	41	47	6937	Asano, Moriwaki	dummy	0	2012/3/19/21:20:51(130.34.95.43)	田中先生許可。	2012/3/19/21:21:42(130.34.95.43)
-24	34	40	6937	Asano, Moriwaki	dummy	0	2012/3/19/21:22:33(130.34.95.43)	0	2012/3/19/21:22:48(130.34.95.43)
24	34	40	6937	Asano, Moriwaki	dummy	0	2012/3/19/21:23:12(130.34.95.43)	田中先生許可。
20	27	41	6937	Kochhar	dummy	0	2012/3/20/10:17:23(130.34.95.43)	0
-23	24	26	6937	Kochhar	dummy	0	2012/3/20/13:47:39(130.34.95.43)	0	2012/3/22/19:8:2(130.34.95.43)
20	42	48	6908	noriki,ohara	dummy	0	2012/3/20/18:32:27(130.34.95.44)	ベー先生承認済み
21	0	4	6908	noriki,ohara	dummy	0	2012/3/20/18:32:53(130.34.95.44)	ベー先生承認済み
-21	18	21	6937	Kochhar	dummy	0	2012/3/20/20:2:31(130.34.95.43)	0	2012/3/20/20:2:51(130.34.95.43)
-21	26	32	5810	Toan	dummy	0	2012/3/20/20:57:13(130.34.95.43)	0	2012/3/21/12:55:16(130.34.95.49)
-21	23	26	4119	konno	dummy	0	2012/3/21/6:32:31(130.34.95.44)	0	2012/3/21/10:42:20(130.34.63.131)
21	23	24	4119	konno	dummy	0	2012/3/21/6:32:31(130.34.95.44)	0
-22	28	32	4119	konno	dummy	0	2012/3/21/10:42:49(130.34.63.131)	0	2012/3/21/10:44:41(130.34.63.131)
-22	26	30	4119	konno	dummy	0	2012/3/21/10:45:2(130.34.63.131)	0	2012/3/22/13:0:27(130.34.95.44)
21	26	28	5810	Toan	dummy	0	2012/3/20/20:57:13(130.34.95.43)	0
-23	41	46	5810	Toan	dummy	0	2012/3/21/12:56:7(130.34.95.49)	0	2012/3/22/19:11:50(130.34.95.49)
21	30	32	4119	konno	dummy	0	2012/3/21/13:38:28(130.34.95.44)	0
21	32	38	6937	N WANG	dummy	0	2012/3/21/13:42:27(130.34.95.43)	フッ素関連ガスは使用しません
22	16	20	4119	nagai	dummy	0	2012/3/21/16:37:52(130.34.74.84)	0
21	46	48	6908	Y. Ohara, A. Noriki	dummy	0	2012/3/21/21:36:30(130.34.95.44)	0
-22	30	36	6908	Ohara Yuki	dummy	0	2012/3/22/0:36:29(130.34.95.44)	0	2012/3/22/0:36:36(130.34.95.44)
22	30	38	6908	Ohara Yuki	dummy	0	2012/3/22/0:36:46(130.34.95.44)	0
-26	26	30	4119	nagai	dummy	0	2012/3/22/10:9:21(130.34.74.84)	0	2012/3/26/12:19:45(130.34.95.44)
22	26	28	4119	konno	dummy	0	2012/3/21/10:45:2(130.34.63.131)	0
-26	33	42	6937	Kochhar	dummy	0	2012/3/22/18:19:42(130.34.95.43)	0	2012/3/26/19:18:40(130.34.95.43)
23	27	33	5810	Toan	dummy	0	2012/3/22/19:12:19(130.34.95.49)	0
23	36	42	4771	Phan	dummy	0	2012/3/22/21:16:56(130.34.95.21)	0
23	42	44	4771	Phan	dummy	0	2012/3/22/23:40:9(130.34.95.21)	0
26	19	23	4119	konno	dummy	0	2012/3/23/13:45:15(130.34.95.37)	0
26	30	32	4119	konno	dummy	0	2012/3/23/14:16:39(130.34.95.44)	0
23	33	36	5810	Toan	dummy	0	2012/3/23/15:14:52(130.34.95.44)	0
26	23	26	6937	Kochhar	dummy	0	2012/3/23/19:14:8(130.34.95.43)	0
26	26	27	4119	nagai	dummy	0	2012/3/22/10:9:21(130.34.74.84)	0
26	27	28	4119	nagai	dummy	0	2012/3/26/12:20:3(130.34.95.44)	0
26	33	41	6937	Kochhar	dummy	0	2012/3/22/18:19:42(130.34.95.43)	0
27	30	36	6937	Kochhar	dummy	0	2012/3/26/19:54:37(130.34.95.43)	0
-28	17	21	4119	konno	dummy	0	2012/3/27/14:49:56(130.34.95.44)	0	2012/3/28/8:53:4(130.34.95.44)
-29	21	25	4119	konno	dummy	0	2012/3/27/15:17:13(130.34.95.44)	0	2012/3/28/9:37:31(130.34.95.44)
-28	30	32	4119	konno	dummy	0	2012/3/27/15:17:53(130.34.95.44)	0	2012/3/28/10:58:6(130.34.95.44)
27	36	41	6937	Kochhar	dummy	0	2012/3/27/15:20:40(130.34.95.43)	0
28	21	26	6937	Kochhar	dummy	0	2012/3/27/16:15:13(130.34.95.43)	0
28	26	30	6937	Kochhar	dummy	0	2012/3/27/19:24:54(130.34.95.43)	0
28	17	20	4119	konno	dummy	0	2012/3/27/14:49:56(130.34.95.44)	0
-29	19	22	4119	konno	dummy	0	2012/3/28/9:37:45(130.34.95.44)	0	2012/3/29/8:56:9(130.34.95.44)
-30	18	22	4119	konno	dummy	0	2012/3/28/9:38:2(130.34.95.44)	0	2012/3/30/8:20:49(130.34.95.44)
-28	31	33	4119	konno	dummy	0	2012/3/28/10:58:20(130.34.95.44)	0	2012/3/28/14:43:6(130.34.95.44)
28	33	39	6937	Kochhar	dummy	0	2012/3/28/14:35:11(130.34.95.43)	0
28	31	32	4119	konno	dummy	0	2012/3/28/10:58:20(130.34.95.44)	0
29	23	28	6936	samoto	dummy	0	2012/3/28/14:48:55(130.34.95.43)	0
29	22	23	6937	Kochhar	dummy	0	2012/3/28/17:59:41(130.34.95.43)	0
29	19	20	4119	konno	dummy	0	2012/3/28/9:37:45(130.34.95.44)	0
30	18	19	4119	konno	dummy	0	2012/3/28/9:38:2(130.34.95.44)	0