2	24	36	6908	Sakaguchi	dummy	0	2006/8/2/10:35:43(172.16.44.138)	YOUTEC p-CVD使用
3	24	48	6909	Sakaguchi	dummy	1	2006/8/3/11:40:17(130.34.95.37)	停電前立ち下げ開始
4	0	48	6909	Sakaguchi	dummy	1	2006/8/3/16:2:6(130.34.95.37)	停電たち下げ
5	0	48	6909	Sakaguchi	dummy	1	2006/8/3/16:2:27(130.34.95.37)	停電たち下げ
6	0	48	6909	Sakaguchi	dummy	1	2006/8/3/16:2:46(130.34.95.37)	停電たち下げ
7	0	48	6909	Sakaguchi	dummy	1	2006/8/3/16:3:6(130.34.95.37)	停電たち下げ
-8	18	32	6908	konno	dummy	0	2006/8/7/8:7:16(130.34.95.37)	0	2006/8/7/8:11:2(130.34.95.37)
9	20	38	6908	konno	dummy	0	2006/8/7/8:7:37(130.34.95.37)	0
-8	18	28	6908	konno	dummy	0	2006/8/8/6:55:16(130.34.95.37)	0	2006/8/8/7:36:30(130.34.95.37)
-17	18	34	6908	konno	dummy	0	2006/8/9/14:24:45(172.16.44.142)	0	2006/8/17/14:50:35(172.16.44.140)
14	30	40	6909	Sakaguchi	dummy	0	2006/8/14/12:36:38(130.34.95.37)	p-TEOS CVD使用
15	36	44	6909	Kobayasi Risato	dummy	0	2006/8/15/1:13:21(172.16.44.146)	0
17	34	37	6908	Kikuchi	dummy	0	2006/8/17/9:14:9(130.34.95.37)	0
17	18	32	6908	konno	dummy	0	2006/8/9/14:24:45(172.16.44.142)	0
21	36	42	6909	Sakaguchi	dummy	0	2006/8/21/13:36:59(172.16.44.142)	p-TEOS CVD使用
22	26	30	6909	Sakaguchi	dummy	0	2006/8/21/15:47:6(130.34.95.37)	p-TEOS CVD使用
22	30	44	6908	Ali	dummy	0	2006/8/21/19:22:30(130.34.95.37)	0
24	22	45	6908	Ali	dummy	0	2006/8/22/13:16:10(130.34.95.37)	0
23	22	38	6909	Sakaguchi	dummy	0	2006/8/22/19:39:29(130.34.95.37)	p-TEOS CVD使用
23	38	48	6909	Kobayasi Risato	dummy	0	2006/8/23/16:19:52(130.34.95.37)	P-CVD使用
28	22	46	6908	Ali	dummy	0	2006/8/24/21:40:53(130.34.95.37)	0
26	22	28	6909	Sakaguchi	dummy	0	2006/8/24/22:52:39(172.16.44.142)	0
26	32	42	6909	Kobayasi Risato	dummy	0	2006/8/26/15:22:48(130.34.95.37)	P-CVD使用
29	20	46	6909	Sakaguchi	dummy	0	2006/8/28/12:49:42(130.34.95.37)	p-TEOS 使用。途中からp-SiN
30	29	46	6908	Ali	dummy	0	2006/8/28/16:41:53(172.16.44.142)	0
31	22	38	6909	beajicheol	dummy	0	2006/8/30/13:41:0(172.16.44.142)	0
31	38	42	6909	Sakaguchi	dummy	0	2006/8/30/14:18:9(130.34.95.37)	p-TEOS CVD使用