1	43	47	6937	Nishino	dummy	0	2011/8/1/20:56:20(130.34.95.43)	0
2	26	32	5810	HE Liang	dummy	0	2011/8/2/10:30:15(130.34.95.49)	0
2	32	36	6937	Nishino	dummy	0	2011/8/2/11:50:24(130.34.95.43)	0
-5	40	48	6937	hatakeyama	dummy	0	2011/8/5/12:13:44(130.34.95.43)	0	2011/8/5/12:14:22(130.34.95.43)
6	16	34	6937	hatakeyama	dummy	0	2011/8/5/12:14:15(130.34.95.43)	デバイスの真空引き
5	42	48	6937	hatakeyama	dummy	0	2011/8/5/12:14:37(130.34.95.43)	デバイスの真空引き
10	30	35	6937	Nishino	dummy	0	2011/8/10/13:10:21(130.34.95.5)	0